Modified chemical vapor deposition using independently controlled thermal sources
AssigneeLucent Technologies Inc.
InventorsStanley F. Marszalek, Katherine Theresa Nelson, Kenneth Lee Walker, Kim Willard Womack, Man Fei Yan
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Abstract
The deposition rate of MCVD processes is enhanced by applying at least a first and a second independently controlled heat source to a plurality of reactants which are used to form deposited particulate matter. The first heat source is adjusted so as to provide at least a specified rate of reaction for the reactants, and the second source is adjusted so as to provide at least a specified deposition rate for the particulate matter.
Claims10
A method for performing modified chemical vapor deposition characterized by the steps of applying a plurality of independently controlled heat sources to a plurality of reactants which are used to form deposited particulate matter, wherein at least one of the plurality of heat sources provides a first region at which the plurality of reactants undergo chemical reaction to form the particulate matter, and wherein at least another of the plurality of heat sources provides a second region at which deposition of the particulate matter is facilitated and at which substantially no chemical reaction to form particulate matter occurs.
A method of performing modified chemical vapor deposition (MCVD) comprising the following steps:
- (a) heating a plurality of chemical reactants so as to cause a chemical reaction wherein particulate matter is formed;
- (b) controlling the temperature of the particulate matter such that the matter is deposited onto a surface;
- and
- (c) consolidating the particulate matter by sintering;
- wherein steps (a), (b) and (c) are performed by applying a plurality of independently controlled heat sources to the particulate matter, at least one of the plurality of heat sources providing a first region at which the plurality of reactants undergo the chemical reaction, and at least another of the plurality of heat sources providing the temperature control and providing a second region at which deposition of the particulate matter onto the surface is facilitated and at which substantially no chemical reaction to form particulate matter occurs.
A method of manufacturing a fiber optic cable using a plurality of independently-controlled heat sources and comprising the steps of:
- (a) using at least one of the plurality of heat sources to heat a plurality of chemical reactants in a first region so as to cause a chemical reaction wherein glass soot is formed in the first region;
- and
- (b) using at least another of the plurality of heat sources to control the temperature of the glass soot in a second region such that the glass soot is deposited onto a surface in the second region in the substantial absence of chemical reaction to form glass soot.
Dependencies are inferred from the claim text.