Apparatus and method for measuring crystal lattice strain

An apparatus for measuring crystal strain comprising:

• a film fixture means to which a negative film having a recording surface on that a transmission electron microscope image of a semiconductor crystal as a sample is recorded is attached, and which is translatable parallel to said recording surface of said negative film;
• a laser light source provided to irradiate a laser light to said recording surface of said negative film perpendicularly to said recording surface of said negative film;
• a translucent screen on which a diffraction image is projected, said diffraction image being produced by irradiating the laser light outputted from said laser light source to said transmission electron microscope image recorded on said recording surface of said negative film;
• an image pick up means for taking said diffraction image projected on said translucent screen;
• and
• a measurement and control means for translating and controlling said film fixture means to scan irradiation positions of said laser light on said recording surface of said negative film, for taking in picked up image data from said image pick up means in synchronization with said scanning, for measuring positions or intensities of diffraction spots of said diffraction image based on said picked up image data, and for mapping information obtained from measurement of diffraction spot positions or diffraction spot intensities for each irradiation position.