US 6,144,082 A · Semiconductor device equipped with semiconductor circuits composed of semiconductor elements and process for production thereof

Abstract

A semiconductor device and a process for production thereof, said semiconductor device having a new electrode structure which has a low resistivity and withstands heat treatment at 400.degree. C. and above. Heat treatment at a high temperature (400-700.degree. C.) is possible because the wiring is made of Ta film or Ta-based film having high heat resistance. This heat treatment permits the gettering of metal element in crystalline silicon film. Since this heat treatment is lower than the temperature which the gate wiring (0.1-5 .mu.m wide) withstands and the gate wiring is protected with a protective film, the gate wiring retains its low resistance.

Claims21

Dependent claims

A semiconductor device equipped with semiconductor circuits composed of semiconductor elements, said semiconductor elements comprising:

a substrate having an insulating surface;
a gate electrode of multi-layer structure over said substrate,
a protective film covering said substrate and the top and sides of said gate electrode,
a gate insulating film covering said protective film, and
a semiconductor film over said gate insulating film, said semiconductor film having at least a pair of source and drain regions and a channel region therebetween.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

09/353,282Filed 14 Jul 1999

Priority

JP 10-20237716 Jul 1998

Granted

7 Nov 2000

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

H10D 30/6739
Characterised by the electrode materials: conductor-insulator-semiconductor electrodes
H10D 30/673
Characterised by the electrodes: characterised by the shapes, relative sizes or dispositions of the gate electrodes
H10D 86/0225
Comprising crystallisation of amorphous, microcrystalline or polycrystalline semiconductor materials: using crystallisation-promoting species,…
H10D 86/441
Characterised by multiple TFTs: interconnections, e.g. scanning lines

Semiconductor device equipped with semiconductor circuits composed of semiconductor elements and process for production thereof

Life of this patent

Semiconductor device equipped with semiconductor circuits composed of semiconductor elements and process for production thereof

Life of this patent

Abstract

Claims21