An inverter apparatus comprising a plurality of semiconductor devices connected in series in one phase, at least one of the semiconductor devices being constituted by a pair consisting of an insulated gate bipolar transistor and a diode, both of which are in reverse parallel connection in one module, wherein
- (1) said insulated gate bipolar transistor comprises:
- a first area of a first conductive type, exposed to a first main surface;
- a second area of a second conductive type, adjacent to said first area and having an impurity concentration lower than that of said first area;
- a third area of the second conductive type, adjacent to said second area and having an impurity concentration lower than that of said second area and having a surface exposed to a second main surface;
- a fourth area of the first conductive type, selectively formed in said second main surface in said third area and having an impurity concentration higher than that of said third area;
- a fifth area of the second conductive type, selectively formed in the second main surface in said fourth area and having an impurity concentration higher than that of said fourth area;
- a first main electrode in low ohmic contact with the first area;
- and
- a second main electrode short-circuiting said fourth and fifth areas on the second main surface;
- and
- (2) said diode has one main surface and other main surface and comprises:
- a sixth area of the second conductive type, exposed to the one main surface;
- a seventh area of the second conductive type, adjacent to said sixth area and having an impurity concentration lower than that of said sixth area;
- an eighth area of the first conductive type, adjacent to said seventh area and having an impurity concentration higher than that of said seventh area;
- a third main electrode in low ohmic contact with the sixth area;
- and
- a fourth main electrode in low ohmic contact with said eighth area;
- wherein said first and third main electrodes are connected to each other, and said second and fourth main electrodes are connected to each other;
- wherein the resistivity of the seventh area in said diode is lower than that of the third area of said insulated gate bipolar transistor;
- and
- wherein the breakdown voltage of the insulated gate bipolar transistor at the time of switching from a conduction state to a blocking state is lower than the breakdown voltage of said insulated gate bipolar transistor and the breakdown voltage of said diode at the time of the blocking state.