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US 6,144,010 AGranted
Method of removing coating film with laser beam and laser processing system
AssigneeSumitomo Heavy Industries, Ltd.
InventorsAkira Tsunemi, Teruhiko Takusagawa, Yukiko Funabiki
Life of this patent
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Abstract
A laser light is applied to the surface of an object to be processed and formed with a coating film and at least an upper portion of the coating film is removed through abrasion, by using an energy density variable optical system capable of applying the laser light to the surface of the object and varying an energy density of the laser light on the surface of the object. The coating film can be removed without using chemicals.
Claims10
A laser processing system comprising:
- a lens for converging or diverging a laser light and applying the laser light to a surface of an object to be processed;
- a lens support mechanism for supporting said lens and adjusting a height of said lens from the surface of the object in accordance with an external control signal, said lens having a front surface which faces the object;
- a height sensor for detecting the height of said lens from the surface of the object;
- control means for receiving an output signal from said height sensor and controlling said lens support mechanism so as to make constant the height of said lens from the surface of the object;
- a fist deflector disposed in an optical path of the laser light to be incident upon said lens, for moving a radiation position of the laser light along a first direction on the surface of the object, by changing a transmission direction of the laser light;
- and
- a nozzle arranged to let out gas in a direction toward the front surface of said lens which faces the object.
4 more elements
Dependencies are inferred from the claim text.