Silicon nitride sinter having high thermal conductivity and process for preparing the same

Abstract

A high thermal conductive silicon nitride base sintered body which comprises a phase comprising crystal grains of silicon nitride and a grain boundary phase containing a compound of at least one element selected from the group consisting of yttrium and the lanthanide elements in an amount of 1 to 20% by weight in terms of oxide amount, and contains free silicon dispersed therein in an amount of 0.01 to 10% by weight based on the whole. This high thermal conductive silicon nitride base sintered body has high strength coupled with high thermal conductivity and thus is useful not only as various parts for semiconductor devices, such as radiating insulating substrates, but as various structural parts for machines, OA apparatuses, etc.

Dependencies are inferred from the claim text.