Method for manufacturing semiconductor device and semiconductor device manufacturing apparatus

A method of manufacturing a semiconductor device comprising:

• performing a first treatment on a semiconductor substrate;
• performing a second treatment on the semiconductor substrate treated in the first treatment;
• and
• controlling an amount of organic materials which adheres onto a surface of the semiconductor substrate at a beginning of the second treatment, said amount of organic materials being controlled to 1 ng/cm.sup.2 or less.

A method of manufacturing a semiconductor device comprising:

• performing a first processing on a semiconductor substrate;
• performing a second processing on the semiconductor substrate treated in the first processing;
• and
• controlling an amount of organic materials which adheres onto a surface of the semiconductor substrate prior to starting the second processing, said amount of organic materials being controlled to 1 ng/cm.sup.2 or less.