Method of fabricating DRAM

A method of fabricating a DRAM wherein a substrate having a memory region and a periphery circuitry region is provided, a word line and a gate are formed thereon in the memory region and the periphery circuitry region respectively, and a first dielectric layer is formed on the substrate to cover the word line and the gate, comprising the steps of:

• forming a bit line in the memory region and forming a contact pad in the periphery circuitry region;
• forming a second dielectric layer on the first dielectric layer;
• forming an opening having a wider upper portion and a narrower lower portion within the first and the second dielectric layer in the memory region to expose the substrate and forming a contact opening in the periphery circuitry region to expose the contact pad;
• forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the periphery circuitry region serves as a contact;
• forming a capacitor dielectric layer on the lower electrode;
• and
• forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.

A method of fabricating an embedded DRAM wherein a substrate having a memory region and a periphery circuitry region is provided, a word line and a gate are respectively formed thereon in the memory region and the periphery circuitry region, and a insulated layer is formed on the substrate to cover the word line and the gate, comprising the step of:

• forming a bit line within the insulated layer in the memory region and forming a contact pad in the periphery circuitry region;
• forming a first dielectric layer on the insulated layer;
• forming a hard material layer having a first opening and a second in the memory region and the periphery circuitry region on the first dielectric layer;
• forming a second dielectric layer on the hard material layer;
• forming a third opening on the first opening in the memory region to expose the substrate and the hard material layer to form a node contact window within the first dielectric layer and the insulated layer, and forming a contact opening in the periphery circuitry region to expose the contact pad;
• forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the periphery circuitry region serves as a contact;
• forming a capacitor dielectric layer on the lower electrode;
• and
• forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.

A method of fabricating an embedded DRAM wherein a substrate having a memory region and a logic circuitry region is provided, a word line and a gate are respectively formed thereon in the memory region and the logic circuitry region, and a insulated layer is formed on the substrate to cover the word line and the gate, comprising:

• forming a bit line within the insulated layer in the memory region and forming a contact pad in the logic circuitry region;
• forming a first dielectric layer on the insulated layer;
• forming a hard material layer having a first opening and a second opening in the memory region and the logic circuitry region on the first dielectric layer;
• forming a second dielectric layer on the hard material layer;
• forming a third opening on the first opening in the memory region to expose the substrate and the hard material layer to form a node contact window within the first dielectric layer and the insulated layer, and forming a contact opening in the logic circuitry region to expose the contact pad;
• forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the logic circuitry region serves as a contact;
• forming a capacitor dielectric layer on the lower electrode;
• and
• forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.