Fabrication of carbon microstructures
AssigneePresident and Fellows of Harvard College
InventorsOlivier J. A. Schueller, Scott Brittain, George M. Whitesides
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Abstract
A technique for forming high-carbon structural articles, such as glassy carbon articles, is provided that involves molding fluid precursors of the article into a predetermined shape, followed by carbonization of the articles. An elastomeric mold can be used to mold the precursors, and the resultant, free-standing articles have features on the micron or nanometer scale. A variety of useful articles including sensors, actuators, microelectromechanical systems, transmission electron microscopy grids, and the like are provided.
Claims19
An article made by the process comprising:
- micromolding a precursor of a high-carbon solid;
- and
- removing the mold to produce a free standing high-carbon solid structure having a carbon content of at least 40% carbon atoms and having a dimension of less than 2 mm.
An article made by the process comprising:
- micromolding a precursor of a high-carbon solid;
- and
- removing the mold to provide a transmission electron micrograph grid of at least 100 mesh made of a high-carbon solid having a carbon content of at least 40% carbon atoms.
Dependencies are inferred from the claim text.