Apparatus and method for dry etching

An apparatus for carrying out dry etching, comprising:

• a pair of electrodes spaced away from each other by a certain distance and defining therebetween a space in which plasma is generated by introducing a reactive gas thereto;
• said space being defined by the pair of electrodes and a pair of opposing enclosures, each enclosure mounted on one of said electrodes and extending toward the opposite enclosure;
• said enclosures being arranged to have a gap therebetween, wherein a first enclosure of said pair of enclosures mounted on one of said electrodes together with an object to be etched is made of the same material as said object to be etched;
• wherein a temperature controller keeps said electrodes to have a common temperature in the range from 30.degree. C. to 50.degree. C.

An apparatus for carrying out dry etching, comprising:

• a pair of electrodes spaced away from each other by a certain distance and defining therebetween a space in which plasma is generated by introducing a reactive gas thereto;
• said space being defined by the pair of electrodes and a pair of opposing enclosures, each enclosure mounted on one of said electrodes and extending toward the opposite enclosure;
• said enclosures being arranged to have a gap therebetween, wherein a first enclosure of said pair of enclosures mounted on one of said electrodes together with an object to be etched is made of the same material as said object to be etched;
• wherein an etching controller judges when etching should be ceased by monitoring an alteration in a light emission intensity of a light having a wavelength of 388 nm.

An apparatus for carrying out dry etching, comprising:

• (a) an etching chamber;
• (b) a pair of electrodes disposed in said etching chamber in facing relation, an object to be etched being placed on one of said electrodes;
• (c) a plate mounted on the other of said electrodes, said plate being formed with a plurality of through-holes;
• and
• (d) a pair of opposing enclosures, each enclosure mounted on one of said electrodes and extending towards the other of the opposing electrodes to define a space therebetween in which plasma is generated by introducing CF.sub.4 gas thereinto through said plurality of through-holes, said enclosures being arranged to have a gap therebetween, wherein a first enclosure of said pair of enclosures which is mounted on the electrode on which the object to be etched is placed, is made of the same material as the object to be etched.

An apparatus for carrying out dry etching, comprising:

• (a) an etching chamber;
• (b) a pair of electrodes disposed in said etching chamber in facing relation, an object to be etched being placed on one of said electrodes;
• (c) a plate mounted on the other of said electrodes, said plate being formed with a plurality through-holes;
• and
• (d) a pair of opposing enclosures, each enclosure mounted on one of said electrodes and extending towards the other of the opposing electrodes to define a space therebetween in which plasma is generated by introducing a reactive gas thereinto through said through-holes, said enclosures being arranged to have a gap therebetween, wherein a first enclosure of said pair of enclosures which is mounted on the electrode on which the object to be etched is placed, is made of the same material as the object to be etched;
• wherein a temperature controller keeps said electrodes to have a common temperature in the range from 30.degree. C. to 50.degree. C.

An apparatus for carrying out dry etching, comprising:

• (a) an etching chamber;
• (b) a pair of electrodes disposed in said etching chamber in facing relation, an object to be etched being placed on one of said electrodes;
• (c) a plate mounted on the other of said electrodes, said plate being formed with a plurality through-holes;
• and
• (d) a pair of opposing enclosures, each enclosure mounted on one of said electrodes and extending towards the other of the opposing electrodes to define a space therebetween in which plasma is generated by introducing a reactive gas thereinto through said through-holes, said enclosures being arranged to have a gap therebetween, wherein a first enclosure of said pair of enclosures which is mounted on the electrode on which the object to be etched is placed, is made of the same material as the object to be etched;
• wherein an etching controller judges when etching should be ceased by monitoring an alteration in a light emission intensity of a light having a wavelength of 388 nm.