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US 6,143,087 AGranted
Methods for treating objects
AssigneeCFMT, Inc.
InventorAlan E. Walter
Life of this patent
Estimating the term…
Abstract
An object is treated by contacting it with an organic solvent and then removing the organic solvent by directly displacing it with a fluid comprising a drying vapor (e.g., isopropyl alcohol or IPA vapor) such that substantially no liquid droplets of organic solvent or drying vapor are left on the surfaces of the object to evaporate after the direct displacement of the organic solvent with the fluid.
Claims23
A method for treating an object having one or more surfaces, comprising:
- placing the object in a vessel;
- introducing an organic solvent into the vessel;
- contacting the surfaces of the object with the organic solvent;
- and
- removing the organic solvent from the surfaces of the object by directly displacing the organic solvent from the surfaces of the object with a fluid comprising a drying vapor by controlling conditions within the vessel such that substantially no liquid droplets of the organic solvent or the drying vapor are left on the surfaces of the object to evaporate after the direct displacement of the organic solvent with the fluid.
2 more elements
Dependencies are inferred from the claim text.