Automated opening and closing of ultra clean storage containers

A substrate handling system adapted to transport a substrate between a first position and a second position, the substrate when in the first position being disposed within a pod having a removable pod door, the second position being within a micro environment, the substrate handling system comprising:

• a load lock chamber having a port for allowing access to the pod in an engagement position and having a removable load lock chamber door for closing the port;
• and
• a robot having an articulating arm comprised of a plurality of links including a proximal link and one or more distal links, wherein at least one of said distal links is provided with at least two degrees of freedom and is configured to support a first tool for removing the load lock chamber door and the pod door to a location within the load lock chamber which is remote from the port, and a second tool for transporting the substrate between the first position and the second position,
• wherein said first and second tools are supported by said one of said distal links so as to have at least two degrees of freedom.