Semiconductor manufacturing apparatus and command setting method

A semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said apparatus comprising:

• display means for displaying a list of the plurality of maintenance commands;
• console-side control means for enabling an operator to select some of the plurality of maintenance commands displayed by said display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• storage means for storing the maintenance menu generated and edited using said console-side control means;
• and
• apparatus-side control means for successively executing the maintenance commands in the maintenance menu stored in said storage means when said apparatus-side control means receives an instruction to execute the maintenance menu,
• wherein said display means displays a plurality of input cells for inputting the maintenance commands constituting the maintenance menu when the maintenance menu is generated, and said console-side control means generates and edits the maintenance menu as the operator alternately selects one of the input cells and one of the maintenance commands in the maintenance command list.

A semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said apparatus comprising:

• display means for displaying a list of the plurality of maintenance commands;
• console-side control means for enabling an operator to select some of the plurality of maintenance commands displayed by said display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• storage means for storing the maintenance menu generated and edited using said console-side control means;
• and
• apparatus-side control means for successively executing the maintenance commands in the maintenance menu stored in said storage means when said apparatus-side control means receives an instruction to execute the maintenance menu,
• wherein said display means displays executed states of the maintenance commands in the maintenance menu that have been selected and executed, so that the executed states are displayed in the same order as that in which the maintenance commands have been executed.

A semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said apparatus comprising:

• display means for displaying a list of the plurality of maintenance commands which are to be executed, and a record of measured values obtained from each of the executed commands;
• console-side control means for enabling an operator to select some of the plurality of maintenance commands displayed by said display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• storage means for storing the maintenance menu generated and edited using said console-side control means;
• and
• apparatus-side control means for successively executing the maintenance commands in the maintenance menu stored in said storage means when said apparatus-side control means receives an instruction to execute the maintenance menu.

A semiconductor manufacturing method for use with a semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said method comprising:

• displaying, using display means, a list of the plurality of maintenance commands;
• enabling an operator, using console-side control means, to select some of the plurality of maintenance commands displayed by the display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• storing, using storage means, the maintenance menu generated and edited using the console-side control means;
• and
• successively executing, using apparatus-side control means, the maintenance commands in the maintenance menu stored in the storage means when the apparatus-side control means receives an instruction to execute the maintenance menu.

A semiconductor manufacturing method for use with a semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said method comprising:

• displaying, using display means, a list of the plurality of maintenance commands;
• enabling an operator, using console-side control means, to select some of the plurality of maintenance commands displayed by the display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• displaying, using the display means, a plurality of input cells for inputting the maintenance commands constituting the maintenance menu when the maintenance menu is generated;
• generating and editing, using the console-side control means, the maintenance menu as the operator alternately selects one of the input cells and one of the maintenance commands in the maintenance command list;
• storing, using storage means, the maintenance menu generated and edited using the console-side control means;
• and
• successively executing, using apparatus-side control means, the maintenance commands in the maintenance menu stored in the storage means when the apparatus-side control means receives an instruction to execute the maintenance menu.

A semiconductor manufacturing method for use with a semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said method comprising:

• displaying, using display means, a list of the plurality of maintenance commands;
• enabling an operator, using console-side control means, to select some of the plurality of maintenance commands displayed by the display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• storing, using storage means, the maintenance menu generated and edited using the console-side control means;
• successively executing, using apparatus-side control means, the maintenance commands in the maintenance menu stored in the storage means when the apparatus-side control means receives an instruction to execute the maintenance menu;
• and
• displaying, using the display means, executed states of the maintenance commands in the maintenance menu selected and executed, so that the executed states are displayed in the same order as that in which the maintenance commands have been executed.

A semiconductor manufacturing method for use with a semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, by using measuring functions of the apparatus, said method comprising:

• displaying, using display means, a list of the plurality of maintenance commands;
• enabling an operator, using console-side control means, to select some of the plurality of maintenance commands displayed by the display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator and to edit the maintenance menu;
• storing, using storage means, the maintenance menu generated and edited using the console-side control means;
• successively executing, using apparatus-side control means, the maintenance commands in the maintenance menu stored in the storage means when the apparatus-side control means receives an instruction to execute the maintenance menu;
• and
• displaying, using the display means, a record of measured values obtained from each of the executed maintenance commands.

A swmiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, said apparatus comprising:

• display means for displaying a list of the plurality of maintenance commands;
• console-side control means for enabling an operator to select some of the plurality of maintenance commands displayed by said display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator;
• storage means for storing the maintenance menu generated using said console-side control means;
• and
• apparatus-side control means for successively executing the maintenance commands in the maintenance menu stored in said storage means when said apparatus-side control means receives an instruction to execute the maintenance menu.

A semiconductor manufacturing method for use with a semiconductor manufacturing apparatus using a plurality of maintenance commands for automatically measuring errors caused by the apparatus or caused by a wafer treatment process, said method comprising:

• displaying, using display means, a list of the plurality of maintenance commands;
• enabling an operator, using console-side control means, to select some of the plurality of maintenance commands displayed by display means, to generate a maintenance menu in which some of the plurality of maintenance commands are combined as desired by the operator;
• storing, using storage means, the maintenance menu generated using the console-side control means;
• and
• successively executing, using apparatus-side control means, the maintenance commands in the maintenance menu stored in the sotrage means when the apparatus-side control means receives an instruction to execute the maintenance menu.