Ink jet recording head
AssigneeSeiko Epson Corporation
InventorFujio Akahane
Life of this patent
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Abstract
A silicon monocrystalline substrate (10) is provided with a piezoelectric element formed by a thin film process, and a plurality of pressure generating chambers 12 is arranged in high density by anisotropic etching. A narrow part (13) and a communicating part (14) are sealed by a sealing plate (20) which has a coefficient of linear expansion which does not exceed twice that of the silicon monocrystalline substrate. A common ink chamber (31) is provided with the sealing plate (20) as one surface and a thin wall (41) forms at least a part of the surface which is opposite to the sealing plate.
Claims19
An ink jet recording head comprising:
- a substrate;
- a plurality of pressure generating chambers formed in said substrate, said pressure generating chambers being respectively communicated with nozzle apertures;
- an elastic film formed on one surface of said substrate;
- a piezoelectric element defined by laminating a piezoelectric material film and an electrode film on a surface of said elastic film corresponding to each pressure generating chamber,
- each pressure generating chamber being associated with a narrow part and a communicating part formed spaced apart from a corresponding one of said nozzle apertures in said substrate;
- and
- a sealing plate sealing the other surface of said substrate, said sealing plate being provided with an ink supply communicating port connecting said communicating part and a common ink chamber.
Dependencies are inferred from the claim text.