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US 6,142,614 AGranted
Piezoelectric actuator using passivation film or interlayer insulating film along with an insulating film to obtain better adhesion
AssigneeSeiko Epson Corporation
InventorsTsutomu Hashizume, Akira Matsuzawa
Life of this patent
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Abstract
Lower electrodes are disposed independently of each other for respective ink cavities through a silicon oxide film on a silicon substrate. PZT films and upper electrodes are disposed on the respective lower electrodes, and then an interlayer insulating film or a passivation film is disposed on top of the whole layer.
Claims18
An actuator with a piezo-electric element comprising:
- a substrate;
- an insulating film disposed on the substrate;
- lower electrodes disposed on the insulating film;
- piezo-electric films disposed on the respective lower electrodes;
- upper electrodes disposed on the respective piezo-electric films;
- and
- an interlayer insulating film, covering the lower electrodes, piezo-electric films and the upper electrodes which respectively comprise a segment,
- wherein the lower electrodes are disposed independently of each other for each segment, and
- wherein the insulating film disposed on the substrate and between each segment is brought into direct contact with the interlayer insulating film.
6 more elements
An actuator with a piezo-electric element comprising:
- a substrate;
- an insulating film disposed on the substrate;
- lower electrodes disposed on the insulating film;
- piezo-electric films disposed on the respective lower electrodes;
- upper electrodes disposed on the respective piezo-electric films;
- and
- a passivation film covering the lower electrodes, piezo-electric films and the upper electrodes which respectively comprise a segment,
- wherein the lower electrodes are disposed independently of each other for each segment, and
- the insulating film disposed on the substrate and between each segment is brought into direct contact with the passivation film.
6 more elements
An actuator with piezo-electric element comprising:
- a substrate;
- an insulating film disposed on the substrate;
- lower electrodes disposed on the insulating film;
- piezo-electric films disposed on the respective lower electrodes;
- upper electrodes disposed on the respective piezo-electric films;
- and
- an interlayer insulating film, covering the lower electrodes, piezo-electric films and the upper electrodes which respectively comprise a segment,
- wherein each of the lower electrodes has an opening through which the insulating film is exposed in a desired region other than a region where each of the piezo-electric films and each of the upper electrodes are disposed, the insulating film thus exposed being brought into direct contact with the interlayer insulating film.
5 more elements
An actuator with a piezo-electric element comprising:
- a substrate;
- an insulating film disposed on the substrate;
- lower electrodes disposed on the insulating film;
- piezo-electric films disposed on the respective lower electrodes;
- upper electrodes disposed on the respective piezo-electric films;
- and
- a passivation film, covering the lower electrodes, piezo-electric films and the upper electrodes which respectively comprise a segment,
- wherein each of the lower electrodes has an opening through which the insulating film is exposed in a desired region other than a region where each of the piezo-electric films and the upper electrodes are disposed, the insulating film thus exposed being brought into direct contact with the passivation film.
5 more elements
An actuator with a piezo-electric element comprising:
- a substrate;
- an insulating film disposed on the substrate;
- first lower electrodes disposed on the insulating film;
- second lower electrodes disposed on the respective first lower electrodes;
- piezo-electric films disposed on the respective second lower electrodes;
- upper electrodes disposed on the respective piezo-electric films;
- and
- an interlayer insulating film, covering the first and second lower electrodes, the piezo-electric films and the upper electrodes which respectively comprise a segment,
- wherein the first lower electrodes are made of conductive material other than one of platinum and platinum alloy,
- wherein the second lower electrodes are disposed independently of each other for each segment, and
- wherein each of the first lower electrodes disposed between each segment is brought into direct contact with the interlayer insulating film.
8 more elements
An actuator with a piezo-electric element comprising:
- a substrate;
- an insulating film disposed on the substrate;
- first lower electrodes disposed on the insulating film;
- second lower electrodes disposed on the respective first lower electrodes;
- piezo-electric films disposed on the respective second lower electrodes;
- upper electrodes disposed on the respective piezo-electric films;
- and
- a passivation film, covering the first and second lower electrodes, the piezo-electric films and the upper electrodes which respectively comprise a segment,
- wherein the first lower electrodes are made of conductive material other than one of platinum and platinum alloy,
- wherein the second lower electrodes are disposed independently of each other for each segment, and
- wherein each of the first lower electrodes disposed between each segment is brought into direct contact with the passivation film.
8 more elements
Dependencies are inferred from the claim text.