Piezoelectrically actuated microvalve

A microvalve comprising:

• a micromechanically structured chip defining a valve seat with a flow opening therethrough, an elastic suspension device and an edge region;
• a valve plate which is defined by a piezoelectric actuator and which is connected to the edge region of the micromechanically structured chip, the longitudinal dimensions of said piezoelectric actuator being adapted to be changed by the application of an electric voltage;
• wherein a decrease in the longitudinal dimensions of the piezoelectric actuator caused by the application of an electric voltage to said piezoelectric actuator is, due to the connection of said piezoelectric actuator with the edge region of the micromechanically structured chip and by means of the suspension device, mechanically converted into a movement of the valve plate relative to the valve seat essentially at right angles to the longitudinal direction, whereby the valve plate will open or close the flow opening in the valve seat.