Method and apparatus for removing leaking gas in an integrated gas panel system

A method of removing process gas leaking from an integrated gas panel system, where said system includes

• a containment enclosure,
• a gas-manifold panel, comprising a plurality of gas-manifold panel blocks, each comprising at least one process-gas channel, mounted within said containment enclosure,
• gas-manifold components mounted upon said gas-manifold panel blocks, and
• a surface interface whereat said gas-manifold components meet said gas-manifold panel blocks,
• wherein each said block defines conduit structure for directing a purging gas to or from the chamber, along a pathway which intersects and passes through said surface interface,
• the method comprising:
• simultaneously directing a stream of purging gas along a pathway extending over said surface interface and along said pathways which intersect and pass through said surface interface.

An integrated gas panel system for delivering process gas to a tool location, comprising:

• a containment enclosure,
• mounted within said containment enclosure, a gas-manifold panel formed of a single unitary gas-manifold panel member, comprising a plurality of process gas channels and a plurality of integral exhaust passages;
• gas-manifold components mounted upon said gas-manifold panel,
• a surface interface whereat said gas-manifold components meet said gas-manifold panel,
• a reservoir within said gas-manifold panel member, disposed in fluid communication with an area above the surface interface, and
• a plurality of exhaust conduits, running from the surface interface to said plurality of integral exhaust passages within said gas-manifold panel member, effective to direct a purging gas from said surface interface to the reservoir.

A method of removing process gas leaking from an integrated gas panel system, where said system includes:

• a containment enclosure,
• a gas-manifold panel formed of a single unitary, gas-manifold panel member, comprising a plurality of process gas channels and a plurality of integral exhaust passages, mounted within said containment enclosure;
• gas-manifold components mounted upon said gas-manifold panel,
• a surface interface whereat said gas-manifold components meet said gas-manifold panel,
• a reservoir within said gas-manifold panel member, disposed in fluid communication with an area above the surface interface, and
• a plurality of exhaust conduits, running from the surface interface to said plurality of integral exhaust passages within said gas-manifold panel member, effective to direct a purging gas from said surface interface to the reservoir;
• the method comprising:
• evacuating or pressuring said reservoir to induce a scavenging flow of purging gas.