Method of manufacturing a resonator device adapted for suppression of fluctuation in resonant resistance
AssigneeFujitsu Limited
InventorsTakashi Miyagawa, Masanori Yachi
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AssigneeFujitsu Limited
InventorsTakashi Miyagawa, Masanori Yachi
Estimating the term…
A resonator device having an insulating substrate, a strip-shaped vibrating element which is mounted on said insulating substrate and is provided with driving electrodes formed on the main opposing surfaces of a piezoelectric substrate, and terminal electrodes which are provided on said insulating substrate so as to be electrically connected with said driving electrodes and to which driving signals are applied by an external signal source. At least the longitudinal side portions of said vibrating element are coated with a surface active agent. With such a constitution, fluctuations in resonant resistance which are due to the excitation level can be suppressed, thereby contributing to the stable operation of the device, reducing the number of producing steps, and raising the yield rate in production.
A method of producing a resonator device comprising:
A method of producing a resonator device comprising:
Dependencies are inferred from the claim text.