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US 6,138,708 AGranted
Mass flow controller having automatic pressure compensator
AssigneeControls Company of America
InventorEdwin Waldbusser
Life of this patent
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Abstract
The present invention is directed to a mass flow controller having an automatic pressure compensator in the form of a dome loaded pressure regulator, wherein the dome loaded pressure regulator is, in turn, controlled by a dome-loading gas line regulated by a pilot pressure regulator. The pilot pressure regulator and the mass flow controller are advantageously controlled by a single microprocessor, and may advantageously all be mounted to a single manifold block.
Claims11
A mass flow control apparatus comprising:
- a mass flow controller having an input and an output;
- a dome loaded process pressure regulator having an input for receiving incoming process gas, and an output operatively coupled to said input of said mass flow controller, for delivering process gas to said mass flow controller at a regulated pressure;
- a pilot pressure regulator operatively coupled at an outlet side thereof to said dome-loaded process pressure regulator by a dome-loading air line, said pilot pressure regulator further being operatively coupled at an inlet side thereof to a source of pressurized gas not part of a process gas line;
- a microprocessor controller operatively coupled to a mass flow controller output signal generator, and further operatively coupled to a control of said pilot pressure regulator for adjusting a dome-loading pressure regulated by said dome-loading regulator in response to said mass flow controller output signal.
1 more element
Dependencies are inferred from the claim text.