Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition

Abstract

A system and related method are disclosed for performing inductively-coupled-plasma-enhanced ionized physical-vapor deposition process for depositing a material layer on a work piece such as a semiconductor substrate or a thin-film head substrate. Within a PVD process chamber, a plurality of inductive antenna segments axially surround a region between the PVD target/cathode assembly and the work piece. The inductive antenna segments are arranged cylindrically around (or conformlly with respect to the physical-vapor deposition target/cathode) and aligned substantially vertically with respect to the target/cathode assembly and/or the work piece. A first radio-frequency (RF) power source provides electrical power to half of the antenna segments to create a first inductively-coupled plasma source, a second RF power source provides electrical power to the remaining antenna segments to create a second inductively-coupled-plasma source. The two inductively-coupled-plasma sources are operated together to produce a multi-zone inductively-coupled-plasma source that generates a rotating inductively coupled magnetic field for uniform high-density PVD plasma generation. The system and method of this invention can be used to produce a much higher ionization ratio for the sputter species to allow ionized PVD collimation or programmable (adjustable) electrical collimation for improved step coverage and bottom coverage depositions on substrates with patterned high-aspect-ratio topography features. Moreover, the system and method of this invention can be used to perform PVD processes at reduced operating pressures (down to 0.1 mTorr or less) with stable ICP-assisted plasma generation. Furthermore, the system and method of this invention can be used to enable very repeatable depositions of ultrathin layers by providing a capability to generate and sustain a highly stable PVD plasma medium using a multi-zone ICP source and allowing the use of reduced PVD target power levels to enable reduced deposition rates.

Dependencies are inferred from the claim text.