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US 6,135,859 AGranted
Chemical mechanical polishing with a polishing sheet and a support sheet
AssigneeApplied Materials, Inc.
InventorJames V. Tietz
Life of this patent
Estimating the term…
Abstract
A chemical mechanical polishing apparatus has a platen, a polishing sheet extending between a first roller and a second roller, and a support sheet extending between a third roller and a fourth roller. A portion of the polishing sheet extends over a surface of the platen to polish a substrate, and a portion of the support sheet extends between the platen and the polishing sheet. The polishing sheet may be a continuous belt or a reel-to-reel tape, and the support sheet may be a continuous belt or reel-to-reel tape.
Claims29
A chemical mechanical polishing apparatus, comprising:
- a platen;
- a polishing sheet extending between a first roller and a second roller, a generally planar portion of polishing sheet between the first and second rollers extending over the platen;
- a support sheet extending between a third roller and a fourth roller, a portion of the support sheet between the third and fourth rollers extending between the platen and the generally planar portion of the polishing sheet;
- and
- a carrier head positioned to hold a substrate in contact with the generally planar portion of the polishing sheet so that the platen presses the support sheet against the polishing sheet and the polishing sheet against the substrate.
2 more elements
A method of chemical mechanical polishing, comprising:
- bringing a substrate into contact with a generally planar portion of a polishing sheet that extends between a first roller and a second roller;
- moving the polishing sheet from the first roller to the second roller;
- and
- moving a support sheet that extends between the generally planar portion of the polishing sheet and a platen in the same direction and at substantially the same speed as the polishing sheet, the platen pressing the support sheet against the polishing sheet and the polishing sheet against the substrate.
1 more element
Dependencies are inferred from the claim text.