Discharge system for a reactor, and process system provided with a discharge system of this kind
AssigneeASM International N.V.
InventorJeroen Jan Stoutjesdijk
Life of this patent
Estimating the term…
Abstract
Discharge system for a reactor, such as a furnace. The discharge system comprises a collection duct, to which a number of discharge lines are connected, each discharge line in turn being coupled to an installation, such as a furnace. In order to keep the reduced pressure at the location of a furnace of this nature as constant as possible, it is proposed to provide a valve at the location of the reactor, which valve adjusts an opening between the discharge line and atmosphere in a controllable manner. In this way, a controlled reduced pressure can be maintained at the location of the valve, i.e. at the outlet from the reactor.
Claims9
A discharge system for a reactor, comprising:
- a gas discharge line having a first end configured to be connected to a discharge of the reactor and a second end configured to be connected to a discharge duct in which a device is arranged which generates a reduced pressure in the discharge duct,
- a branch line having one end open to said discharge line between said first and second ends, said branch line having a second end to provide a gas input to the branch line and into the discharge line, and
- a valve within the branch line, said valve being responsive to a pressure difference between the gas input and the reduced pressure so that at the open end of the branch line the reduced pressure does not exceed a predetermined value.
A process system, comprising:
- a reactor configured to treat wafers by flowing a process gas past them, the reactor having a discharge connectable to a discharge duct in which a device is arranged to generate a reduced pressure in the discharge duct;
- and
- a discharge system for the reactor comprising:
- a discharge line having a first end connected to the discharge of the reactor and a second end connectable to the discharge duct,
- a branch line having one end open to said discharge line between said first and second ends, said branch line having a second end to provide a gas input to the branch line and into the discharge line, and
- a valve located within the branch line, the valve being responsive to a pressure difference between the gas input and the reduced pressure within the discharge line so that at the open end of the branch line the reduced pressure does not exceed a predetermined value.
Dependencies are inferred from the claim text.