Apparatus and process for nozzle production utilizing computer generated holograms

In a method for ablation of a matrix of nozzles on a substrate with controlled nozzle shapes and controlled center to center spacing from a beam of coherent light of a specific frequency for producing at least one nozzle array on the substrate, said method including the steps of:

• providing a plurality of masks, each said mask configured in a plane having a plurality of subapertures with each subaperture containing at least a portion of a computer generated hologram for producing converging coherent light of the specific frequency from the subaperture with image information from the subaperture to form a real image at a working distance from the mask having a profile for ablating the nozzles of specific shape and location on the substrate;
• holding the substrate at the working distance from the masks;
• holding the plurality of masks overlying the substrate to register the real images of the subapertures to the substrate to pattern the nozzles;
• dividing the coherent light of the specific frequency into multiple beams with one the beam intersecting each mask at at least one subaperture;
• and,
• scanning the coherent light source of the specific frequency for simultaneously causing each said beam of the multiple beams at each said mask to simultaneously scan a plurality of subapertures at least along one direction in the plane of the mask to produce on the substrate nozzles.