US 6,129,331 AGranted

Low-power thermopneumatic microvalve

AssigneeRedwood Microsystems, Inc.

InventorsAlbert Karl Henning, Mark Zdeblick, John Stuart Fitch, Dean Allyn Hopkins, Jr., Leslie Joe Lilly

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Abstract

A thernopneumatic valve comprises a fluid channel plate defining a fluid port. A diaphragm plate is attached to the fluid channel plate. The diaphragm plate includes a displaceable diaphragm to selectively obstruct the fluid port of the fluid channel plate. A thermal isolating heater is connected to the diaphragm plate. The thermal isolating heater includes a thermal isolating heater body with a heating surface, a perimeter wall defining an extended axial cavity to confine a thermopneumatic working fluid that is used to control the position of the displaceable diaphragm, and a diaphragm obstruction structure to limit the motion of the displaceable diaphragm into the extended axial cavity.

Claims22

Dependent claims

A thermopneumatic valve, comprising:

a fluid channel plate defining a fluid port;
a diaphragm plate attached to said fluid channel plate, said diaphragm plate including a displaceable diaphragm to selectively obstruct said fluid port of said fluid channel plate, said diaphragm plate being formed with a semiconductor material;
and
a thermal isolating heater connected to said diaphragm plate, said thermal isolating heater including a thermal isolating heater body with a heating surface, a perimeter wall defining an extended axial cavity to confine a thermopneumatic working fluid that is used to control the position of said displaceable diaphragm, and a diaphragm obstruction structure to limit the motion of said displaceable diaphragm into said extended axial cavity.

1 more element

Dependencies are inferred from the claim text.