Process for producing dielectrics and fine single crystal powders and thin film capacitor
AssigneeSumitomo Chemical Company, Limited
InventorsKunio Saegusa, Yutaka Suzuki
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Abstract
Disclosed is a process for producing dielectrics which satisfy the formula of: WXMO.sub.3 --(l--w)(XO.sub.y --aGO.sub.z) wherein the symbols are as defined in the specification, which comprises mixing an oxide of X, an oxide of M and an oxide of G or compounds capable of being converted to the above oxides so that the region occupied by the oxides or the compounds is smaller than 0.1 .mu.m in diameter and then, firing the mixture by heating at a temperature at which the mixture can be converted to oxides. A process for producing fine single crystal powders and a thin film capacitor are also disclosed.
Claims6
A process for producing dielectric glass-ceramics which satisfy the formula of:
- wXMO.sub.3 --(l--w) (XO.sub.y --aGO.sub.z),
- which comprises mixing an oxide of X, an oxide of M, an oxide of G or compounds capable of being converted to the above oxides so that a region occupied by each of the oxides or the compounds is smaller than about 0.1 .mu.m in diameter and then, firing or heating the mixture at a temperature of 400-1200.degree. C. at which the crystal phase of XMO.sub.3 can be formed,
- wherein X is at least one element selected from the group consisting of Li, Na, K, Pb, Ba, Mg, Ca, Sr, La, Y and Bi, M is at least one element selected from the group consisting of Al, Mn, Ti, Zr, Sn, Mg, Zn, Fe, Co, Ni, Nb, Ta and W, G is at least one element selected from the group consisting of B, As, Sb, Si, Ge, Te and P, y and z each represent the number of oxygen, and when X is Li, Na and K, y=0.5, , when X is Pb, Ba, Mg, Ca and Sr, y=1, and when X is La, Y and Bi, y=1.5, and when G is B, As and Sb, z=1.5, when G is Si, Ge and Te, z=2 and when G is P, z=2.5, w represents a mol number, a is a real number and 0.3<w.ltoreq.0.95 and 1/19.ltoreq.a.ltoreq.2 with a proviso that when X is only Pb, M is at least one element selected from the group consisting of Zr and Ti, 0.3<w<0.95 and 1/19<a.ltoreq.1, when X is only Ba, M is at least one element selected from the group consisting of Zr, Ti and Sn, 0.4.ltoreq.w.ltoreq.0.95 and 1/19.ltoreq.a.ltoreq.2.
Dependencies are inferred from the claim text.