US 6,125,522 AGranted

Manufacturing method for electrostatic deflector

AssigneeNikon Corporation

InventorMamoru Nakasuji

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Abstract

Methods are disclosed for manufacturing an electrostatic deflector comprising multiple electrodes. The electrostatic deflector is of a type not tending to generate large eddy currents during use. The electrodes are arranged as electrode-members relative to each other in a desired angular relationship with high precision around an optical axis. Each electrode is formed by adhering a conductive film to portions of the surface of an insulative electrode-member material except an outer surface of the electrode-member, and a conductive film is adhered to at least some of the inner surface of an insulating outer casing. The electrode-members are inserted into respective grooves in a jig; then the outer surface of each electrode-member is attached to the inner surface of the outer casing. Lead wires can be attached to the electrodes, and the jig is removed by dissolution or melting.

Claims16

Dependent claims

A method for manufacturing an electrostatic deflector for use in a time-varying magnetic field, the electrostatic deflector defining an interior space and being operable to deflect a charged particle beam passing through the interior space, the method comprising the steps:

(a) providing multiple electrode-members formed of an electrically insulative material, each electrode-member having an outer surface and a longitudinally extended projection;
(b) providing an outer casing formed of an electrically insulative material, the outer casing having an inner surface;
(c) selectively coating at least a portion of the outer surface of each electrode-member and of the inner surface of the outer casing with an electrically conductive film;
(d) providing a jig made of a rigid material, the jig having grooves each adapted to receive the projection of a respective electrode-member;
(e) arranging the electrode-members at a desired angular orientation relative to each other about an axis by situating the electrode-members in the jig so that the projections of the electrode-members are received within respective grooves of the jig;
(f) while maintaining the angular orientation of the electrode-members with the jig, attaching the outer surface of each electrode-member to the inner surface of the outer casing so that the coated portion of each electrode-member does not contact the coated portion of the inner surface of the outer casing, and wherein at least a part of the coated portion of the surface of each electrode-member is exposed to the interior space;
and
(g) removing the jig.

5 more elements

(a) providing multiple electrode-members formed of an electrically insulative material, each electrode-member having an outer surface and a longitudinally extended projection;
(b) providing an outer casing formed of an electrically insulative material, the outer casing having an inner surface;
(c) selectively coating at least a portion of the outer surface of each electrode-member and of the inner surface of the outer casing with an electrically conductive film;
(d) arranging the electrode-members at a desired angular orientation relative to each other by mounting the electrode-members to a jig made of a rigid but soluble material, the jig defining grooves each adapted to receive the projection of a respective electrode-member, wherein the projections of the electrode-members are received in respective grooves;
(e) while maintaining the angular orientation of the electrode-members, attaching the outer surface of each electrode-member to the inner surface of the outer casing using mounting screws inserted from the outside of the casing so that the coated portion of each electrode-member does not contact the coated portion of the inner surface of the outer casing, the mounting screws being selected to preserve a predetermined electrical insulation between the electrode-members and the outer casing;
and
(f) after step (e), removing the jig.

4 more elements

Dependencies are inferred from the claim text.