# US 6,124,599 A · Electron beam exposure system and method of manufacturing devices using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,124,599 A - Document ID: US6124599A - Status: Granted - Kind: A - Application number: 08/856,863 - Filed: 1997-05-15 - Granted: 2000-09-26 - Earliest claimed: 1996-06-12 - Assignees: Canon Kabushiki Kaisha - Inventors: Masato Muraki - Web page: https://patentgrep.com/patent/US6124599A ## CPC - H01J 37/304: Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - H01J 37/3174: {Particle-beam lithography, e.g. electron beam lithography} - H01J 37/3177: {Multi-beam, e.g. fly's eye, comb probe} - H01J 2237/31762: Computer and memory organisation - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract An electron beam exposure system which includes a plurality of electron beam exposure apparatuses and achieves reduction in the memory of an electron beam exposure apparatus by eliminating data transfer/data conversion for each electron beam exposure apparatus. The plurality of electron beam exposure apparatuses of the electron beam exposure system deflect an electron beam on the basis of control data and expose a pattern onto an object to be exposed, and a data control device sends, on the basis of pattern information of a pattern to be exposed which is sent out from one of the electron beam exposure apparatuses, control data corresponding to the pattern to be exposed to the electron beam exposure apparatus which has sent the pattern information. Also disclosed is a method of manufacturing devices, which utilizes a plurality of electron beam exposure apparatuses. ## Claims ### Claim 1 An electron beam exposure system, comprising: a plurality of electron beam exposure apparatuses, each of which deflects an electron beam on the basis of control data held in a memory of the electron beam apparatus to expose a pattern onto an object, each electron beam exposure apparatus comprising detection means for detecting pattern information indicating what pattern is to be exposed; and data control means for sending, on the basis of pattern information detected by one of said plurality of electron beam exposure apparatuses and sent out from said one electron beam exposure apparatus to said data control means if control data corresponding to the pattern to be exposed is not already held in the memory of said one electron beam exposure apparatus, control data corresponding to the pattern to be exposed to said one electron beam exposure apparatus which sent the pattern information to said data control means. ### Claim 2 (depends on 1) An electron beam exposure system according to claim 1, wherein each of said plurality of electron beam exposure apparatuses further comprises control means for (i) comparing, with the detected pattern information, pattern information related to a pattern corresponding to control data held in said one of said plurality of electron beam exposure apparatuses, and (ii) sending the detected pattern information to said data control means when the detected pattern information does not match the held pattern information. ### Claim 3 (depends on 1) An electron beam exposure system according to claim 1, wherein said data control means comprises storing means for storing a plurality of control data corresponding to mutually different patterns. ### Claim 4 (depends on 1) An electron beam exposure system according to claim 1, wherein said data control means generates, from the detected pattern information, control data for said plurality of electron beam exposure apparatuses, which control data corresponds to the pattern to be exposed. ### Claim 5 (depends on 1) An electron beam exposure system according to claim 1, wherein the control data includes data for controlling a deflection position of an electron beam and data for controlling the length of time the electron beam is irradiated at the deflection position. ### Claim 6 (depends on 1) An electron beam exposure system according to claim 1, wherein said data control means is contained in a space having a lower degree of cleanness than a space in which said plurality of electron beam apparatuses are contained. ### Claim 7 A method of manufacturing devices, comprising: providing a plurality of electron beam exposure apparatuses, each of which deflects an electron beam on the basis of control data held in a memory of the electron beam exposure apparatus to expose a circuit pattern onto a wafer, each electron beam exposure apparatus comprising detection means for detecting pattern information indicating what circuit pattern is to be exposed; and providing data control means, which sends, on the basis of pattern information detected by one of said plurality of electron beam exposure apparatuses and sent out from the one electron beam exposure apparatus to the data control means if control data corresponding to the circuit pattern to be exposed is not already held in the memory of the one electron beam exposure apparatus, control data corresponding to the circuit pattern to be exposed to the one electron beam exposure apparatus which sent the pattern information to the data control means. ### Claim 8 (depends on 7) A method of manufacturing devices according to claim 7, further comprising comparing, with the detected pattern information, pattern information for a circuit pattern corresponding to control data held in the one electron beam exposure apparatus, and sending the detected pattern information to said data control means when the detected pattern information does not match the held pattern information. ### Claim 9 (depends on 7) A method of manufacturing devices according to claim 7, further comprising storing, in the data control means, a plurality of control data corresponding to mutually different circuit patterns. ### Claim 10 (depends on 7) A method of manufacturing devices according to claim 7, further comprising generating, by the data control means, control data for each of the plurality of electron beam exposure apparatuses based on the detected pattern information, which control data corresponds to the circuit pattern to be exposed. ### Claim 11 (depends on 7) A method of manufacturing devices according to claim 7, wherein the control data includes data for controlling a deflection position of an electron beam and data for controlling a length of time that the electron beam irradiates the deflection position. ### Claim 12 (depends on 7) A method of manufacturing devices according to claim 7, further comprising containing the data control means in a space having a lower degree of cleanness than a space in which the plurality of electron beam apparatuses are contained. ### Claim 13 An electron beam exposure apparatus which deflects an electron beam on the basis of control data corresponding to a pattern to be exposed and exposes the pattern onto an object to be exposed, said apparatus comprising: means for storing a plurality of control data corresponding to different patterns; detection means for detecting, in advance, pattern information indicating which one of the different patterns is to be exposed onto the object to be exposed; and control means for selecting control data corresponding to the detected pattern information from said storing means, exposing the object to be exposed on the basis of the selected control data, and deleting from said storing means control data with a low frequency of use when said storing means reaches a predetermined capacity. ### Claim 14 (depends on 13) An electron beam exposure apparatus according to claim 13, wherein the control data includes data for controlling a deflection position of an electron beam and data for controlling the length of time the electron beam is irradiated at the deflection position. ### Claim 15 A method of manufacturing devices by using an electron beam exposure apparatus which deflects an electron beam on the basis of control data corresponding to a circuit pattern to be exposed and exposes the circuit pattern onto a wafer, said method comprising: storing a plurality of control data corresponding to different circuit patterns in a memory of the electron beam exposure apparatus; detecting, in advance, pattern information indicating which one of the different circuit patterns is to be exposed onto the wafer; selecting control data corresponding to the detected pattern information from the plurality of control data stored in said storing step; exposing the wafer on the basis of the selected control data; and deleting control data with a low frequency of use from the memory of the electron beam exposure apparatus when the memory reaches a predetermined capacity. ### Claim 16 (depends on 15) A method of manufacturing devices according to claim 15, wherein the control data includes data for controlling a deflection position of an electron beam and data for controlling the length of time the electron beam is irradiated at the deflection position. ### Claim 17 An electron beam exposure system comprising: a central processing unit; a large-capacity memory connected to the central processing unit; and a plurality of electron beam exposure apparatuses, each connected to the central processing unit and each including a small-capacity memory, a control system, and a wafer recognition detection system, wherein, with respect to each electron beam exposure apparatus, the wafer recognition detection system detects pattern information corresponding to a wafer supplied to the electron beam exposure apparatus, the control system determines whether control data corresponding to the pattern information is stored in the small-capacity memory, and, if no control data corresponding to the pattern information is stored in the small-capacity memory, the control system sends the pattern information to the central processing unit, which locates control data corresponding to the pattern information in the large-capacity memory and sends the control data back to the electron beam exposure apparatus where the control data is stored in the small-capacity memory, after which the control system causes the electron beam exposure apparatus to expose the wafer in accordance with the control data stored in the small-capacity memory. ### Claim 18 (depends on 17) A system according to claim 17, wherein, with respect to each electron beam exposure apparatus, if the control system determines that control data corresponding to the pattern information is stored in the small-capacity memory, the control system causes the electron beam exposure apparatus to expose the wafer in accordance with the control data stored in the small-capacity memory. ### Claim 19 (depends on 17) A system according to claim 17, wherein the plurality of electron beam exposure apparatuses are maintained in an environment that is cleaner than that which includes the central processing unit and the large-capacity memory. ### Claim 20 (depends on 17) A system according to claim 17, wherein the control system of each electron beam exposure apparatus deletes control data having a low frequency of use from the small-capacity memory. ### Claim 21 A method of manufacturing devices using an electron beam exposure system including a central processing unit, a large-capacity memory, and a plurality of electron beam exposure apparatuses each including a small-capacity memory, the method comprising the steps of: detecting pattern information corresponding to a wafer supplied to an electron beam exposure apparatus; determining whether control data corresponding to the pattern information is stored in the small-capacity memory of the electron beam exposure apparatus; and if no control data corresponding to the pattern information is stored in the small-capacity memory, sending the pattern information to the central processing unit, locating control data corresponding to the pattern information in the large-capacity memory, sending the control data back to the electron beam exposure apparatus where the control data is stored in the small-capacity memory, and thereafter exposing the wafer in accordance with the control data stored in the small-capacity memory. ### Claim 22 (depends on 21) A method according to claim 21, further comprising the step of exposing the wafer in accordance with the control data stored in the small-capacity memory if control data corresponding to the pattern information is stored in the small-capacity memory. ### Claim 23 (depends on 21) A method according to claim 21, wherein the plurality of electron beam exposure apparatuses are maintained in an environment that is cleaner than that which includes the central processing unit and the large-capacity memory. ### Claim 24 (depends on 20) A method according to claim 20, further comprising the step of deleting control data having a low frequency of use from the small-capacity memory.