Back to results
US 6,123,516 AGranted
Vacuum pump
AssigneeLeybold Vakuum GmbH
InventorsHans Josef Burghard, Wolfgang Giebmanns, Rudolf Bahnen
Life of this patent
Estimating the term…
Abstract
A vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining the pump chamber. The vacuum pump is fitted with a gas ballast device to avoid damage being caused in the adjoining chambers by the gases being pumped, the ballast gas being delivered via the chamber adjoining the pump chamber.
Claims9
A vacuum pump comprising:
- an outer casing;
- at least one pumping chamber disposed in an interior pumping chamber casing, said at least one pumping chamber having a proximate gas inlet disposed in said interior pumping chamber casing;
- at least one adjacent pump chamber adjoining said pumping chamber within said outer casing;
- and
- a gas ballast means for admitting ballast gas into said at least one pumping chamber through said at least one adjacent pump chamber;
- said gas ballast means including an inlet including a valve and a constriction disposed in said outer casing remote from the proximate gas inlet of said interior pumping chamber casing for selectively purging said at least one adjacent pump chamber when said valve is closed and in which said constriction creates a low pressure within said at least one adjacent pump chamber when said valve is opened when said pump requires gas ballast such that gas from said at least one pumping chamber is prevented from being released through said outer casing to the atmosphere.
3 more elements
Dependencies are inferred from the claim text.