System and method for delivery of a vapor phase product to a point of use

A system for delivery of an electronic specialty gas to a semiconductor processing tool, the system comprising:

• a storage vessel containing a liquified electronic specialty gas under its own vapor pressure;
• and
• a plurality of columns, each column fractionating a liquid introduced therein into a respective heavy liquid fraction and a respective light vapor fraction;
• a first column of the plurality of columns being connected to receive, as the liquid introduced therein, the liquified electronic specialty gas from the storage vessel;
• and
• a conduit connected to a second column of the plurality of columns for removing therefrom the respective light vapor fraction;
• wherein the system is connected to the semiconductor processing tool for introducing the second column light vapor fraction thereto.

A method for delivery of a vapor phase product to a point of use, the method comprising:

• providing a storage vessel containing a liquid chemical under its own vapor pressure;
• introducing a stream of the liquid chemical into a column, whereby the liquid chemical is fractionated into a liquid heavy fraction and a light vapor fraction;
• and
• introducing the light vapor fraction to the point of use.

A method for delivery of an electronic specialty gas to a semiconductor processing tool, the method comprising:

• providing a storage vessel containing a liquified electronic specialty gas under its own vapor pressure;
• providing a plurality of columns, each column fractionating a liquid introduced therein into a respective heavy liquid fraction and a respective light vapor fraction,
• a first column of the plurality of columns being connected to receive, as the liquid introduced therein, the liquified electronic specialty gas from the storage vessel;
• and
• removing from a second column of the plurality of columns the respective light vapor fraction;
• introducing the second column light vapor fraction to the semiconductor processing tool.

A system for delivery of an electronic specialty gas to a semiconductor processing tool, the system comprising:

• a storage vessel containing a liquified electronic specialty gas under its own vapor pressure;
• a column connected to receive the liquified electronic specialty gas from the storage vessel, whereby the chemical is fractionated into a liquid heavy fraction and a light vapor fraction;
• and
• a conduit connected to the column for removing the light vapor fraction therefrom;
• wherein the system is connected to the semiconductor processing tool for introducing the light vapor fraction thereto, and the light vapor fraction is an electronic specialty gas.

A method for delivery of an electronic specialty gas to a semiconductor processing tool, the method comprising:

• providing a storage vessel containing a liquid chemical under its own vapor pressure;
• introducing a stream of the liquified electronic specialty gas into a column, whereby the chemical is fractionated into a liquid heavy fraction and a light vapor fraction;
• and
• introducing the light vapor fraction to the semiconductor processing tool, wherein the light vapor fraction is an electronic specialty gas.

An on-site chemical distribution system, comprising:

• a storage vessel containing a liquid chemical under its own vapor pressure;
• and
• a plurality of vapor supply systems connected in parallel and downstream from the storage vessel, the vapor supply systems being connected to receive the liquid chemical and each producing a respective vapor product;
• wherein the vapor supply systems are each connected to one or more respective points of use for introducing the respective vapor product thereto.

A method for on-site distribution of a chemical, the method comprising:

• providing a storage vessel containing a liquid chemical under its own vapor pressure;
• introducing the liquid chemical to a plurality of vapor supply systems connected in parallel and downstream from the storage vessel, each of the vapor supply systems producing a respective vapor product;
• and
• introducing the respective vapor product to one or more respective points of use.