Non-planar micro-optical structures
AssigneeUniversity of New Mexico
InventorsGregory M. Peake, Stephen D. Hersee
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Abstract
In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing or substantially free of oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention.
Claims17
A non-faceted microlens consisting essentially of a non-amorphous material and having a focal length of 50 .mu.m or less.
An array of microlenses mounted on a substrate, each of said microlenses consisting essentially of a non-amorphous material and having a focal length of 50 .mu.m or less.
Dependencies are inferred from the claim text.