Method and apparatus for establishing electrical contact between a wafer and a chuck
OwnerGregory S. Horner, Meindert J. Kleefstra +2inventors
InventorsGregory S. Horner, Meindert J. Kleefstra, Roger L. Verkuil, Robert A. Miles
Life of this patent
Estimating the term…
Abstract
A needle is pressed into the backside oxide of a semiconductor wafer and a voltage applied to the wafer greater than the breakdown voltage of the oxide in order to make an electrical contact with the bulk material of the wafer. A capacitor plate is provided proximate to a wafer on a chuck and a Kelvin probe is provided proximate to the wafer. A varying voltage is applied between the chuck and the capacitor plate and a voltage is monitored between the Kelvin probe and the chuck. The monitored voltage remaining constant indicates electrical contact between the chuck and the wafer.
Claims14
A method for making electrical contact between a semiconductor wafer having a dielectric layer and a wafer chuck holding said wafer, said dielectric layer having a breakdown voltage, said method comprising:
- urging a pointed contact against said dielectric layer;
- and
- momentarily applying a voltage equal or greater than said breakdown voltage between said contact and said chuck, thereby creating an ohmic connection between said wafer and said chuck.
A method for determining electrical contact between a semiconductor wafer and a wafer chuck, said method comprising:
- providing a capacitor plate proximate to said wafer;
- providing a Kelvin probe proximate to said wafer;
- applying a varying voltage between said chuck and said capacitor plate;
- and
- monitoring a voltage between said Kelvin probe and said chuck, wherein said monitored voltage remaining constant is indicative of electrical contact.
A method for determining electrical contact between a semiconductor wafer and a wafer chuck, said method comprising:
- providing a first capacitor plate proximate to said wafer;
- providing a second capacitor plate proximate to said wafer;
- applying a varying voltage between said chuck and said first capacitor plate;
- and
- monitoring a voltage between said second capacitor plate and said chuck, wherein said monitored voltage remaining constant is indicative of electrical contact.
An apparatus for making electrical contact between a semiconductor wafer having a dielectric layer and a wafer chuck holding said wafer, said dielectric layer having a breakdown voltage, said apparatus comprising:
- a pointed contact;
- a contact actuator for urging said contact against said dielectric layer;
- and
- a voltage source for momentarily applying a voltage equal or greater than said breakdown voltage between said contact and said chuck, thereby creating an ohmic connection between said wafer and said chuck.
An apparatus for determining electrical contact between a semiconductor wafer and a wafer chuck, said apparatus comprising:
- a Kelvin probe proximate to said wafer;
- a capacitor plate proximate to said wafer;
- a variable voltage source between said chuck and said capacitor plate;
- and
- a voltage monitor between said Kelvin probe and said chuck, wherein a monitored voltage remaining constant is indicative of electrical contact.
An apparatus for determining electrical contact between a semiconductor wafer and a wafer chuck, said apparatus comprising:
- a first capacitor plate proximate to said wafer;
- a second capacitor plate proximate to said wafer;
- a variable voltage source between said chuck and said first capacitor plate;
- and
- a voltage monitor between said second capacitor plate and said chuck, wherein a monitored voltage remaining constant is indicative of electrical contact.
Dependencies are inferred from the claim text.