Dual robotic arm end effectors having independent yaw motion

A robotic arm structure providing .theta.- and R-motion which includes at least two links, each having a proximal end portion and a distal end portion, with the .theta. motion being about a primary axis at the proximal end portion of a proximalmost of the links, the R motion proceeding radially from the primary axis, comprising:

• a first end effector pivotally mounted for rotation relative to the distal end portion of a distalmost link about an end effector axis which is parallel to the primary axis;
• a first motor connected to rotate the first end effector about the end effector axis so as to provide an independent yaw (Y) motion for the first end effector;
• a second end effector pivotally mounted for rotation relative to the distal end portion of the distalmost link about the end effector axis;
• a second motor connected to the second end effector about the end effector axis so as to provide an independent yaw (Y) motion for the second end effector independent from the yaw motion of the first end effector;
• an elevator structure movable along a Z axis, the robotic arm structure being supported by the elevator structure;
• and
• means for controllably tilting the elevator structure with respect to the Z axis.

A robotic arm structure providing .theta.- and R-motion which includes at least two links, each having a proximal end portion and a distal end portion, with the .theta. motion being about a primary axis at the proximal end portion of a proximalmost of the links, the R motion proceeding radially from the primary axis, comprising:

• a first end effector pivotally mounted for rotation relative to the distal end portion of a distalmost link about an end effector axis which is parallel to the primary axis;
• a first motor connected to rotate the first end effector about the end effector axis so as to provide an independent yaw (Y) motion for the first end effector;
• a second end effector pivotally mounted for rotation relative to the distal end portion of the distalmost link about the end effector axis;
• a second motor connected to the second end effector about the end effector axis so as to provide an independent yaw (Y) motion for the second end effector independent from the yaw motion of the first end effector,
• wherein the robotic arm structure is adapted to operate in a semiconductor processing environment.