Interconnect structure for joining a chip to a circuit card
AssigneeInternational Business Machines Corporation
InventorsChristina M. Boyko, Anthony P. Ingraham, Voya R. Markovich, David J. Russell
Life of this patent
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Abstract
A solder interconnection uses preferably lead-rich balls for making a low temperature chip attachment directly to any of the higher levels of packaging substrate. After a solder ball has been formed using standard processes, a ball limiting metal mask is formed using photoresist. A thin cap layer of preferably pure tin is deposited on a surface of the solder balls using a tin aqueous immersion process.
Claims12
An interconnect structure for a semiconductor chip comprising:
- a Pb-rich ball, surrounded by a barrier photoresist, attached to said semiconductor chip and having an exposed surface;
- and
- a layer of Sn entirely covering said exposed surface of said Pb-rich ball, said layer of Sn having a thickness of less than 12.7 .mu.m (0.5 mils).
An interconnect structure formed by a process comprising the steps of:
- providing an IC chip and a microelectronic circuit card;
- depositing a ball comprising a solder on solder wettable input/output (I/O) terminals of the IC chip such that the ball has an exposed surface for connecting to the microelectronic circuit card;
- immersing the exposed surface of the ball in an aqueous immersion solution thereby depositing a layer of a material having a thickness on the exposed surface of the ball;
- providing a matching footprint of the solder wettable I/O terminals on the microelectronic circuit card;
- aligning the ball on the IC chip with the corresponding footprint on the microelectronic circuit card;
- and
- reflowing the layer of the material on the exposed surface to form an eutectic alloy on the ball to bond the IC chip to the microelectronic circuit card.
An interconnect structure formed by a process comprising the steps of:
- a) forming a Pb-rich ball on a substrate such that the Pb-rich ball has an exposed surface;
- b) forming a photoresist barrier surrounding the Pb-rich ball;
- and
- c) immersing the exposed surface of the Pb-rich ball in an aqueous immersion solution thereby depositing a capping layer of Sn having a thickness on the exposed surface of the Pb-rich ball.
An interconnect structure for joining an integrated circuit (IC) chip to a microelectronic circuit card formed by a process comprising the steps of:
- depositing a ball comprising a solder on solder wettable input/output (I/O) terminals of the IC chip such that the ball has an exposed surface for connecting to the microelectronic circuit card;
- immersing the exposed surface of the ball in an aqueous immersion solution thereby depositing a layer of a material having a thickness on the exposed surface of the ball;
- providing a matching footprint of solder wettable I/O terminals on the microelectronic circuit card;
- aligning the ball on the IC chip with the corresponding footprint on the microelectronic circuit card;
- and
- reflowing the layer of the material on the exposed surface to form an eutectic alloy on the ball to bond the IC chip to the microelectronic circuit card,
- wherein the microelectronic circuit card comprises at least one of the group consisting of a ball grid array, a flex laminate chip carrier, and a laminate chip carrier.
An interconnect structure comprising a Pb-rich ball formed over a first surface of an integrated circuit chip, the Pb-rich ball having an exposed surface, and an Sn-rich cap entirely covering the exposed surface of the ball.
An interconnect structure comprising a Pb-rich ball formed over a first surface of an integrated circuit chip and a Au-rich cap formed on an upper surface of the ball.
Dependencies are inferred from the claim text.