Hybrid magnetic substrate and method for producing the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorKazuo Eda
Life of this patent
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Abstract
According to the present invention, a hybrid magnetic substrate is provided, which includes: a magnetic substrate; and a holding substrate directly bonded to the magnetic substrate through at least one of a hydrogen bond and a covalent bond. Furthermore, a method for producing a hybrid magnetic substrate having the magnetic substrate and the holding substrate is provided, which includes the steps of: cleaning a surface of the magnetic substrate to be bonded and a surface of the holding substrate to be bonded; allowing the cleaned surfaces to be subjected to a hydrophilic treatment; and attaching the surfaces, which are subjected to the hydrophilic treatment, to each other to directly bond the magnetic substrate to the holding substrate.
Claims28
A hybrid magnetic substrate comprising a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on a surface of the magnetic substrate, and the holding substrate is in direct contact with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step, and a covalent bond transformed from the hydrogen bond, said covalent bond including an oxygen atom.
A method for producing a hybrid magnetic substrate having a magnetic substrate and a holding substrate each having a bonding surface, comprising the steps of:
- forming an inorganic thin film on the bonding surface of the magnetic substrate;
- cleaning a surface of the inorganic thin film and the bonding surface of the holding substrate;
- allowing the cleaned surface of the inorganic thin film and the bonding surface of the holding substrate to be subjected to a hydrophilic treatment and allowing water from the hydrophilic treatment to remain on the surfaces following the hydrophilic treatment;
- and
- attaching the surfaces, which are subjected to the hydrophilic treatment, so that the bonding surface of the holding substrate is in direct contact with the surface of the inorganic thin film by direct-bonding.
A magnetostatic wave device comprising a hybrid magnetic substrate having a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on the magnetic substrate, and the holding substrate is direct-bonded with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a covalent bond and an ion bond with the atoms forming an interface layer mainly participating in the direct bonding, and additionally a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step, wherein an electrode for exciting a magnetostatic wave is provided on the magnetic substrate.
A magnetic device comprising a hybrid magnetic substrate having a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on the magnetic substrate, and the holding substrate direct-bonded with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a covalent bond and an ion bond with the atoms forming an interface layer mainly participating in the direct bonding, and additionally a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step,
- wherein the magnetic substrate has a magneto-optic effect and the magnetic substrate has a function as an optical isolator.
A magnetic device comprising a hybrid magnetic substrate having a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on the magnetic substrate, and the holding substrate direct-bonded with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a covalent bond and an ion bond with the atoms forming an interface layer mainly participating in the direct bonding, and additionally a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step,
- wherein the holding substrate is a light-transmitting substrate having an electro-optic effect, and an optical device is formed on the light-transmitting substrate.
An integrated magnetic device comprising a hybrid magnetic substrate having a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on the magnetic substrate, and the holding substrate direct-bonded with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a covalent bond and an ion bond with the atoms forming an interface layer mainly participating in the direct bonding, and additionally a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step,
- wherein the holding substrate is made of a semiconductor material and at least one element selected from the group consisting of an electronic element and an optical element is formed on the holding substrate.
An optical isolator comprising:
- a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on a surface of the magnetic substrate, and the holding substrate is in direct contact with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step, and a covalent bond transformed from the hydrogen bond, said covalent bond including an oxygen atom, said directly bonded magnetic substrate and holding substrate being heat-treated at a temperature in the range of 200.degree. C. to 800.degree. C.;
- an optical waveguide formed in said magnetic substrate, said waveguide having a light transmitting property and operating via the Faraday effect, said waveguide having a light incident side and a light outputting side;
- a polarizer on the light incident side of said waveguide;
- and
- an analyzer on the light outputting side of said waveguide.
A magnetostatic wave device, comprising:
- a magnetic substrate and a holding substrate, wherein an inorganic thin film is formed on a surface of the magnetic substrate, and the holding substrate is in direct contact with a surface of the inorganic thin film by direct-bonding through at least one of the group consisting of a hydrogen bond between hydroxyl groups from water between said substrates remaining from a hydrophilic treatment step, and a covalent bond transformed from the hydrogen bond, said covalent bond including an oxygen atom, said directly bonded magnetic substrate and holding substrate being heat-treated at a temperature in the range of 200.degree. C. to 800.degree. C.;
- a plurality of interdigital electrodes, for exciting a magnetostatic wave, provided on said magnetic substrate;
- and
- a magnet for applying a magnetic field to said magnetic substrate, said magnet being located above said electrodes.
Dependencies are inferred from the claim text.