Electromagnetic and nuclear radiation detector using micromechanical sensors

A method for imaging electromagnetic or nuclear radiation, comprising the steps of:

• exposing a two dimensional array of micromechanical sensors formed on a single wafer to electromagnetic or nuclear radiation;
• detecting changes in said micromechanical sensors resulting from said exposure to electromagnetic or nuclear radiation;
• and
• transforming said detected changes into output signals.

An apparatus for detecting nuclear radiation, comprising:

• a radiation sensor having an element exposed to a source of radiation, the sensor having at least one physical property affected by radiation;
• means for monitoring radiation-induced changes in the at least one physical property of the sensor;
• and
• means for correlating changes in the at least one physical property to a measure of radiation;
• wherein
• the sensor comprises a microcantilever connected to a base, where the microcantilever consists of a material or layered materials which converts energy of radiation, if present, into a physical change in the microcantilever;
• wherein
• the microcantilever or layered materials on the microcantilever exhibits a change in elastic modulus upon radiation damage induced by absorption of nuclear radiation.