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US 6,117,243 AGranted
CVD device for coating the inside of hollow bodies
AssigneeSchott Glaswerke
InventorMarten Walther
Life of this patent
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Abstract
A CVD device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device and an optical detective device, wherein the plasma-igniting device and optical detective device are connected to a control and analysis unit, analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line of the plasma.
Claims6
A device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device, and an optical detecting device, wherein the
- plasma-igniting device (5) produces a timed sequence of ignition pulses,
- the optical detecting device (14) detects light pulses and emission lines of plasma, and
- at least the plasma-igniting device (5) and optical detecting device (14) are connected to a control and analysis unit (6), analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line.
Dependencies are inferred from the claim text.