Electromagnetically driven microactuated device and method of making the same

A micropump comprising:

• (a) a pump body formed in a substrate and including a pump chamber and a magnetically permeable diaphragm movable between first and second operative positions to vary the volume of the pump chamber;
• and
• (b) an electromagnetic pump driver coupled to the pump body in a generally parallel and overlapping relationship relative to the diaphragm to selectively apply an electromagnetic force and thereby drive the diaphragm between its first and second operative positions.

A microvalve comprising:

• (a) a valve body formed in a substrate and including a valve seat and a magnetically permeable diaphragm movable between first and second operative positions, the diaphragm forming a seal with the valve seat in the first operative position;
• and
• (b) an electromagnetic valve driver coupled to the valve body in a generally parallel and overlapping relationship relative to the diaphragm to selectively apply an electromagnetic force and thereby drive the diaphragm between its first and second operative positions.