US 6,115,231 A · Electrostatic relay

Abstract

An electrostatic relay comprises: a torsional elasticity portion supported on a substrate such that a gap is maintained from the substrate and arranged to have a beam shape; a movable structure portion which can be rotated by dint of elastic support of the torsional elasticity portion; at least one movable contact provided for at least an end of the movable structure portion; a movable electrode disposed between a fulcrum P of rotation of the movable structure portion and the movable contact; at least one fixed contact formed on the substrate at a position opposite to the movable contact such that contact is permitted; and a fixed electrode formed on the substrate at a position opposite to the movable electrode, wherein at least a portion between the fulcrum P of rotation of the movable structure portion and the movable contact is formed into an elastic connection portion.

Claims15

Dependent claims

An electrostatic relay comprising:

a substrate;
a torsional elasticity portion supported on said substrate such that a gap is maintained from said substrate and arranged to have a beam shape;
a movable structure portion rotatably supported by said torsional elasticity portion;
at least one movable contact provided at an end of said movable structure portion;
a movable electrode disposed between a fulcrum of rotation of said movable structure portion and said movable contact;
at least one fixed contact formed on said substrate at a position opposite to said movable contact such that contact is permitted;
and
a fixed electrode formed on said substrate at a position opposite to said movable electrode;
wherein at least one portion between the fulcrum of rotation of said movable structure portion and said movable contact is formed into an elastic connection portion.

6 more elements

Dependencies are inferred from the claim text.

Electrostatic relay

Life of this patent

Electrostatic relay

Life of this patent

Abstract

Claims15