Patterned molecular self-assembly
AssigneeVirginia Tech Intellectual Properties, Inc.
InventorsYanjing Liu, Guy A. Schick
Life of this patent
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Abstract
A patterned molecular self-assembly is provided. The patterned molecular self-assembly comprises a support having an exposed patterned surface and a non-patterned surface. A compound is selectively adsorbed on the exposed patterned surface. The compound may comprise a first compound selectively adsorbed on the exposed patterned surface and a second compound selectively adsorbed on the first compound to form at least one bilayer. The patterned molecular self-assembly may further comprise a first set of bilayers and a second set of bilayers wherein the first set of bilayers has a different composition than the second set of bilayers.
Claims16
A process for preparing a patterned molecular self-assembly, the process comprising the sequential steps of:
- a) providing a support having a surface;
- b) patterning the support by applying a resist to the support, masking the support, exposing the support to activate the resist, and removing the mask to yield a patterned support having an exposed surface and a surface covered with the resist, wherein a portion of the surface of the support is exposed, wherein an inert compound is applied to the exposed surface of the patterned support;
- c) selectively adsorbing a first compound on the exposed surface of the support, wherein the resist is removed before the first compound is selectively adsorbed on the support;
- and
- d) selectively adsorbing a second compound on the first compound to form a patterned molecular self-assembly.
A process for preparing a multi-patterned molecular self-assembly, the process comprising the sequential steps of:
- a) providing a support having a surface;
- b) forming a first pattern on the support wherein a first portion of the surface of the support is exposed;
- c) selectively adsorbing a first compound on the first exposed portion of the surface of the support;
- d) selectively adsorbing a second compound on the first compound to form a first bilayer;
- e) applying an inert compound to the first bilayer;
- f) patterning the support a second time to expose a second portion of the surface of the support;
- g) selectively adsorbing a third compound on the exposed second portion of the surface of the support;
- and
- h) selectively adsorbing a fourth compound on the third compound to form a second bilayer.
A process for preparing a patterned molecular self-assembly, the process comprising the sequential steps of:
- a) providing single crystal silicon support having a surface;
- b) applying a photoresist to the surface of the single crystal silicon support;
- c) masking the support;
- d) exposing the support to ultraviolet light;
- e) removing the mask to yield a patterned single crystal silicon support exposed surface and a surface covered with the photoresist;
- f) applying a reactive oligomer solution to the first exposed surface;
- g) removing the photoresist to expose a second surface of the support;
- h) selectively adsorbing a first compound to the exposed second surface of the support;
- i) selectively adsorbing a second compound on the first compound to form a bilayer;
- and
- j) repeating steps (h) and (i) to form a multi-layered patterned molecular self-assembly.
A process for preparing a multi-patterned molecular self-assembly, the process comprising the sequential steps of:
- a) providing a single crystal silicon support having a surface;
- b) applying a photoresist to the surface of the single crystal silicon support;
- c) masking the support;
- d) exposing the support to ultraviolet light;
- e) removing the mask to yield a patterned single crystal silicon support having a first exposed surface and a surface covered with the photoresist;
- f) selectively adsorbing a first compound on the first exposed surface of the support;
- g) selectively adsorbing a second compound on the first compound to form a first bilayer;
- h) repeating steps (f) and (g) to form a first multi-layered, patterned molecular self-assembly;
- I) masking the substrate and the first multi-layered, patterned molecular self-assembly;
- j) exposing the substrate to ultraviolet light;
- k) removing the mask to yield a second exposed surface of the support;
- l) selectively adsorbing a third compound on the second exposed surface of the support;
- m) selectively adsorbing a fourth compound on the third compound to form a second bilayer;
- n) repeating steps (l) and (m) to form a second multi-layered, patterned molecular self-assembly;
- and
- o) removing the photoresist from the substrate to yield a multi-patterned, multi-layered molecular self-assembly.
Dependencies are inferred from the claim text.