Lid assembly for a process chamber employing asymmetric flow geometries

A lid assembly for a vapor deposition apparatus of the type having an enclosure housing a process chamber, said lid assembly comprising:

• a base plate having a body including first and second opposed major surfaces disposed on opposite sides of the body, with primary and secondary throughways extending therebetween, a subportion of said second major surface lying in a plane of truncation with the remaining portions of said second major surface being recessed from said plane of truncation to define central and annular recesses, said annular recess having an annular, recessed base surface including an inner edge and an outer edge, said annular recess having two spaced-apart side surfaces extending respectively from said inner edge and said outer edge of said annular base surface and terminating proximate to said plane of truncation, with each of said primary and secondary throughways extending from an opening in said first major surface and terminating in an orifice in said second major surface, with orifices associated with secondary throughways being positioned in one of said side surfaces and orifices associated with said primary throughways being disposed in said central recess.

A lid assembly for a vapor deposition apparatus of the type having an enclosure housing a process chamber and a supply of gas attached thereto, said lid assembly comprising:

• a base plate having a body including opposed major surfaces disposed on opposite sides of the body, a primary throughway and two secondary throughways, a conduit having an input aperture and a plurality of output apertures, with each of said primary and secondary throughways placing said opposed major surfaces in fluid communication, said input aperture being coupled to said supply of gas, one of said plurality of output apertures being coupled to said primary throughway, with the remaining plurality of output apertures being coupled to said secondary throughways, with said primary and secondary throughways being arranged to provide two fluid streams of said gas egressing from said second major surface in two orthogonal directions.