Analyzer for modeling and optimizing maintenance operations

A method for modeling a task having input parameters and one or more activities, said method comprising the steps of:

• collecting time-varying input parameters;
• modifying said time-varying input parameters;
• generating derived variables, including the steps of:
• performing a search on said time-varying input parameters using one or more functional forms;
• correlating said functional forms to said search results;
• and
• ranking said functional form based on said correlated results;
• applying a primary analyzer to said input parameters to generate outputs corresponding to said activities;
• and
• optimizing said outputs, including the steps of:
• generating all combinations of said discrete activities into enumerated sets;
• and
• deriving a common objective function for each of said enumerated sets, including the steps of:
• evaluating the cost of said set of discrete activities;
• optimizing said continuous activities based on said cost;
• and
• merging the results of said evaluating step and said continuous activities optimizing step into said common objective function.

An analyzer for a plasma etching equipment having one or more input parameters and activities, said input parameters having discrete and continuous variables, said analyzer controlling one or more task activities directed at said equipment, said analyzer comprising:

• a data collection device coupled to said equipment for collecting input parameters from said equipment;
• a derived variable generator, including:
• a search engine coupled to said data collection device, said search engine examining said input parameters using one or more functional forms;
• a correlator coupled to said search engine;
• and
• a sorter coupled to said correlator, said sorter ranking said functional forms based on the result of said correlator;
• a primary analyzer coupled to said data collection device, said primary analyzer generating outputs relating to activities to be performed on said equipment;
• and
• an optimizer, including:
• an enumerator for generating all combinations of discrete activities into enumerated sets;
• and
• a common objective function generator coupled to said enumerator, said common objective function generator further including:
• a cost analyzer for evaluating the cost of said discrete activities;
• a continuous activity optimizer coupled to said cost analyzer;
• and
• an objective generator coupled to said cost analyzer and said continuous activity optimizer, said objective generator merging the outputs of said cost analyzer and said continuous activity optimizer into said common objective function.

A method for modeling a task having input parameters and one or more activities, said method comprising the steps of:

• collecting said input parameters;
• generating derived variables, including the steps of:
• performing a search on said input parameters using one of more functional forms;
• correlating said functional forms to the results of the performed search;
• ranking said functional forms based on the results of the step of correlating;
• applying a primary analyzer to said input parameters and said derived variables to generate outputs corresponding to said activities;
• and
• optimizing said analyzer.

A method for modeling a task having input parameters and one or more activities, said method comprising the steps of:

• collecting said input parameters;
• applying a primary analyzer to said input parameters to generate outputs corresponding to said activities;
• and
• optimizing said analyzer.