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US 6,104,029 AGranted
Spectrometer and method of spectroscopy
AssigneeVG Systems Limited
InventorsPeter Coxon, Bryan Barnard, H. Sebastian Von Harrach
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AssigneeVG Systems Limited
InventorsPeter Coxon, Bryan Barnard, H. Sebastian Von Harrach
Estimating the term…
A spectrometer and method of spectroscopy are provided for surface analysis. The spectrometer comprises an energy analyser for analysing the energies of charged particles liberated from a sample, a lens arranged to project a diffraction image of the analysis area at the image plane of the lens and a detector for detecting the charged particles. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first direction according to their emission angles and are distributed along another direction according to their energies. The detector is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra.
A spectrometer comprising an energy analyser for analysing energies of charged particles emitted from an analysis area of a sample, a lens arranged to project a diffraction image of at least part of said analysis area at the image plane of said lens, and a detector for detecting said charged particles, wherein said analyser and lens are arranged to generate an image at said detector in which said charged particles are distributed along a first direction of said image according to their emission angles and said charged particles are distributed along a second direction of said image according to their energies, said detector being arranged to detect the distribution of charged particles along said first direction.
A method of measuring energy spectra of charged particles emitted from a surface over a range of emission angles comprising, the steps of (a) forming a diffraction image of said charged particles, (b) resolving said charged particles spatially according to their energies, where steps (a) and (b) are performed in either order and (c) forming an image of said charged particles in which said charged particles are distributed in a first direction according to their emission angles and in a second direction according to their energies, and (d) deriving from said image angle-resolved energy spectra of said charged particles.
A lens for collecting and focusing a divergent stream of charged particles comprising means defining an input aperture for receiving said divergent stream, a lens axis extending through said input aperture, first electrode means, second electrode means spaced from said first electrode means along said lens axis and comprising a multi-apertured electrically conductive web arranged to allow charged particles in said stream to pass therethrough, wherein a portion of the surface of said electrically conductive web is spaced from and arranged to converge towards said lens axis in a direction towards said input aperture thereby to provide an electric field component which opposes divergence of said stream when a potential difference is applied between said first and second electrode means to accelerate said charged particles towards said second electrode means.
Dependencies are inferred from the claim text.