Back to results
US 6,103,010 AGranted
Method of depositing a ferromagnetic film on a waveguide and a magneto-optic component comprising a thin ferromagnetic film deposited by the method
AssigneeAlcatel
InventorChristian Belouet
Life of this patent
Estimating the term…
Abstract
A thin ferromagnetic film is deposited directly onto the surface of a waveguide. The crystalline orientation of the ferromagnetic film is restricted to a predetermined orientation by pulverizing nuclei that do not have the predetermined orientation.
Claims7
A pulverization method for controlling crystalline direction during deposition of a ferromagnetic thin film onto a waveguide surface, comprising steps of:
- (A) pre-selecting a desired crystalline orientation for a thin film to be deposited on the waveguide surface;
- (B) while depositing the ferromagnetic thin film onto the waveguide surface, also simultaneously
- (1) irradiating an ion beam at the waveguide surface, said ion beam having a channelling angle of incidence favoring the preselected crystalline orientation, and
- (2) adjusting energy of the ion beam to pulverize nuclei having other than the pre-selected desired crystalline orientation.
1 more element
Dependencies are inferred from the claim text.