Fluid storage and dispensing system

A fluid storage and dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly for discharge of the gas from the vessel;
• and
• a liquid contained in the vessel interior volume selected from the group consisting of liquefied hydride gases and liquefied acid gases.

A fluid storage and dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel;
• and
• wherein the liquid hydride comprises a hydride species selected from the group consisting of arsine, phosphine, stibine, silane and diborane.

A fluid storage and dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel;
• and
• a liquid contained in the vessel interior volume selected from the group consisting of arsine, boron trichloride and boron trifluoride.

A fluid storage and gas dispensing system, comprising:

• a storage and dispensing vessel constructed and arranged for holding a liquid whose vapor constitutes the fluid to be dispensed, wherein the fluid is contained in the storage and dispensing vessel, at a pressure at which the fluid is in a liquid state;
• the storage and dispensing vessel including a fluid flow port;
• a dispensing assembly coupled to the outlet port;
• and
• a fluid pressure regulator/phase separator assembly interiorly disposed in the vessel, to retain liquid in the vessel and to prevent liquid from flowing into the dispensing assembly during gas dispensing;
• and
• a controller for selectively actuating the dispensing assembly to effect flow of gas deriving from the liquid in the vessel, through the fluid regulator/phase separator assembly and the dispensing assembly, for discharge of the gas from the system;
• so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element.

A fluid storage and gas dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel;
• and
• having a single seam at the fluid flow port.

A fluid storage and gas dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel;
• and
• wherein the vessel contains a hydride fluid selected from the group consisting of arsine, phosphine, stibine, silane and diborane.

A semiconductor manufacturing system comprising a semiconductor manufacturing apparatus utilizing a gas, and a source of said gas, wherein said source comprises:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel, so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element;
• and
• a fluid in the interior volume of the fluid storage and dispensing vessel, wherein said fluid is selected from the group consisting of high pressure gases and liquefied gases.

A method for storage and dispensing of a fluid, comprising:

• containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator by a flow control element in said fluid flow path downstream of said fluid pressure regulator;
• and
• selectively dispensing the confined fluid by opening the flow control element in said fluid flow path to cause fluid to flow downstream of the fluid pressure regulator, and discharging fluid, so that fluid during such discharge flows through the fluid pressure regulator prior to flow through the flow control element;
• wherein said fluid is maintained in said confined state in an enclosed interior volume of a fluid storage and dispensing vessel having a fluid flow port, and said fluid pressure regulator is associated with the fluid flow port.

A method of manufacturing a semiconductor product, comprising:

• containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator by a flow control element in said fluid flow path downstream of said fluid pressure regulator;
• selectively dispensing the confined fluid by opening the flow control element in said fluid flow path to cause fluid to flow downstream of the fluid pressure regulator, and discharging fluid, so that fluid during such discharge flows through the fluid pressure regulator prior to flow through the flow control element;
• and
• using the discharged fluid in the manufacture of the semiconductor product;
• wherein said fluid is maintained in said confined state in an enclosed interior volume of a fluid storage and dispensing vessel having a fluid flow port, and said fluid pressure regulator is associated with the fluid flow port.

A fluid storage and dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly for discharge of the gas from the vessel;
• wherein the fluid pressure regulator is arranged for discharge of the gas from the vessel at a subatmospheric pressure.

A semiconductor manufacturing system comprising a semiconductor manufacturing apparatus utilizing a gas, and a source of said gas, wherein said source comprises:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly for discharge of the gas from the vessel;
• wherein the fluid pressure regulator is arranged for discharge of the gas from the vessel at a subatmospheric pressure.

A method of manufacturing a semiconductor product, comprising:

• containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator;
• selectively dispensing the confined fluid by opening the fluid flow path to fluid flow downstream of the fluid pressure regulator, and discharging fluid at a rate determined by the fluid pressure regulator;
• using the discharged fluid in the manufacture of the semiconductor product;
• wherein the fluid pressure regulator is arranged for discharge of fluid to the fluid flow path at a subatmospheric pressure.

A fluid storage and dispensing system, comprising:

• a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;
• a fluid at superatmospheric pressure in said interior volume;
• a fluid dispensing assembly coupled in fluid flow communication with the port;
• a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel so that gas is discharged from the vessel at pressure lower than said superatmospheric pressure;
• the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, along a flow path through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel, so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element.

A fluid storage and dispensing apparatus, comprising:

• a fluid storage and dispensing vessel having a neck defining a port of the vessel;
• a gas regulator mounted in the port, and set to a predetermined pressure level, for dispensing of gas, deriving from fluid in said vessel, at the predetermined pressure level;
• and
• a valve head joined to the neck of the vessel, said valve head including a valve that is selectively openable or closable, arranged so that gas during said dispensing flows through the fluid pressure regulator prior to flow through the valve, to control dispensing of gas at the predetermined pressure level for which the gas regulator is set.