Article comprising an inductor
AssigneeLucent Technologies Inc.
InventorsBradley Paul Barber, Nathan Belk, David J. Bishop, Peter L. Gammel
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Abstract
An article comprising a micro-machined, passively self-assembling inductor is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means by which the inductor loop is moved away from an underlying substrate, typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.
Claims22
An article comprising a passively self-assembling inductor, the inductor having:
- a substrate;
- a conductive loop physically adapted to receive an electrical signal, wherein at least a portion of the loop is spaced from the substrate;
- and
- passive self-assembly means operable to create the space between the portion of the loop and the substrate during formation of the inductor.
A variable-frequency oscillator, the variable-frequency oscillator having;
- a frequency selective network incorporating a passively self-assembling inductor, the inductor having:
- a substrate;
- a conductive loop physically adapted to receive an electrical signal, wherein at least a portion of the loop is spaced from the substrate;
- and
- passive self-assembly means operable to create the space between the portion of the loop and the substrate during formation of the inductor;
- a transistor electrically connected to the load;
- and
- a terminating network electrically connected to the transistor.
Dependencies are inferred from the claim text.