Particulate removal from point of use exhaust scrubbers

A submicron filter assembly, comprising:

• an input coupled to an exhaust gas destruction unit for receiving treated exhaust gas;
• a submicron filter for filtering submicron particulates out of said treated exhaust gas;
• and
• an output through which said treated and filtered exhaust gas is expelled;
• wherein said submicron filter comprises an electrostatic filter, said electrostatic filter comprises two charged grids to which high voltage alternating current is applied, and said grounded second grid includes a mist screen.

A method, comprising;

• passing at least one exhaust gas into an enhaust gas destruction unit to treat at least one said exhaust gas;
• passing said treated exhaust gas through a submicron filter assembly connected to said exhaust destruction unit to filter submicron particulates out of said treated exhaust gas;
• and
• passing said treated and submicron filtered exhaust gas to an exhaust output means;
• wherein said submicron filter assembly comprises a mist eliminator and a HEPA filter.

A device, comprising:

• an input coupled to receive at least one exhaust gas;
• an exhaust gas destruction unit connected to said input for treating said at least one exhaust gas;
• a submicron filter assembly connected to said exhaust gas destruction unit for filtering submicron particulates out of said treated exhaust gas;
• and
• an output connected to said submicron filter assembly;
• wherein said submicron filter comprises a mist eliminator and a HEPA filter.

A submicron filter assembly, comprising:

• an input coupled to an exhaust gas destruction unit for receiving treated exhaust gas;
• a submicron filter for filtering submicron particulates out of said treated exhaust gas;
• and
• an output through which said treated and filtered exhaust gas is expelled;
• wherein said submicron filter comprises a mist eliminator and a HEPA filter .