Temperature controlled chamber liner
AssigneeApplied Materials, Inc.
InventorsTalex Sajoto, Jun Zhao, Charles Dornfest, Leonid Selyutin
Life of this patent
Estimating the term…
Abstract
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.
Claims17
An apparatus for lining a process zone, comprising:
- a) a removable insert sized and adapted for insertion into the process zone;
- b) a heating member disposed in the insert;
- c) an electrical connection for coupling power to the heating member;
- and
- d) a support disposed on a lower portion of the insert to support the insert in a process zone, the support having an upper portion and a lower portion, wherein the cross-sectional area of one portion is greater than the cross-sectional area of the other portion.
An apparatus for processing substrates having a removable insert, comprising:
- a) a chamber body having a lid, a sidewall, and a bottom surface, the body defining a process zone;
- b) an insert disposed in the process zone adjacent the chamber sidewall;
- c) a heating member disposed in the insert;
- d) a support disposed between the insert and the bottom surface;
- and
- e) a bottom insert disposed over a portion of the bottom surface.
An apparatus for processing substrates having a removable insert, comprising:
- a) a chamber body having a lid, a sidewall, and a bottom surface, the body defining a process zone;
- b) an insert disposed in the process zone adjacent the chamber sidewall;
- c) a heating member disposed in the insert;
- d) a support disposed between the insert and the bottom surface of the chamber body, the support having an upper portion and a lower portion, wherein the cross-sectional area of one portion is greater than the cross-sectional area of the other portion.
Dependencies are inferred from the claim text.