Method and apparatus for direct probe sensing
AssigneeElectroglas, Inc.
InventorsRussell Kaplan, Ralph Scherp
Life of this patent
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AssigneeElectroglas, Inc.
InventorsRussell Kaplan, Ralph Scherp
Estimating the term…
An improved method and apparatus for automatically aligning a wafer prober to the bonding pads of a semiconductor device are provided. In one embodiment of one aspect of the invention, a pattern of contact electrodes is located using a low magnification image of a number of contact electrodes. A shape representative of a contact electrode point is then fitted to each of the number of contact electrodes using a high magnification image of the contact electrodes and a centroid of that fitted shape is determined. The position of the centroid is compared to the position of each of the number of pads, and the pads and contact electrodes are moved relative to each other to a position for contact between the pads and contact electrodes. Other aspects and other embodiments are also described.
A method for accurately positioning a plurality of contact electrodes relative to a plurality of pads, the method comprising:
A method for accurately determining the location of each of a plurality of contact electrodes, the method comprising:
A method for imaging a plurality of contact electrodes, the method comprising:
A method for accurately positioning a plurality of contact electrodes and a plurality of pads relative to each other, the method comprising:
A method for viewing contact electrodes on a probe module located in a wafer prober, said method comprising:
A computer readable medium storing executable computer program instructions which, when executed by a processing system, cause the processing system to perform a method comprising:
A computer readable medium storing executable computer program instructions which, when executed by a processing system, cause the processing system to perform a method comprising:
A computer readable medium storing executable computer program instructions which, when executed by a processing system, cause the processing system to perform a method comprising:
A computer readable medium storing executable computer program instructions which, when executed by a processing system, cause the processing system to perform a method comprising:
Dependencies are inferred from the claim text.