Turbo-Molecular pump with metal matrix composite rotor and stator
AssigneeApplied Materials, Inc.
InventorMasanori Ono
Life of this patent
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Abstract
The invention provides a vacuum processing system comprising a vacuum processing chamber and a turbo-molecular pump having a rotor and/or stator comprised of metal matrix composites. Another aspect of the invention provides a turbo-molecular pump having a rotor and/or a stator comprised of metal matrix composites. Because metal matrix composites are able to withstand higher operating temperatures than the aluminum alloys currently used in rotors and stators, the rotor vanes and the stator vanes that are made of metal matrix composites can provide a higher exhaust capacity with faster rotor rotations.
Claims15
A vacuum processing system, comprising:
- (a) a vacuum processing chamber;
- and
- (b) a turbo-molecular pump disposed on the vacuum processing chamber, comprising:
- (i) a casing having an inlet port and an outlet port;
- (ii) a stator having a plurality of stator vanes extending radially inwardly from an inner surface of the casing;
- (iii) a rotor having a plurality of rotor vanes disposed in an alternating arrangement with the stator vanes, wherein the rotor vanes consisting of a metal matrix composite;
- and
- (iv) a motor disposed coaxially with the rotor.
An apparatus for evacuating a gas from a processing chamber, comprising:
- (a) a turbo-molecular pump having a plurality of rotor vanes consisting of a metal matrix composite.
A vacuum processing system, comprising:
- (a) a vacuum processing chamber;
- and
- (b) a turbo-molecular pump having a plurality of rotor vanes consisting of a metal matrix composite.
Dependencies are inferred from the claim text.