Micro-electromechanical relays

A method for fabricating a micro-electromechanical relay comprising the steps of:

• (a) forming, by micro-machining techniques, at least one first layer of magnetic material on a substrate;
• (b) forming, by micro-machining techniques, a mold structure defining at least one location for at least one electromagnetic coil;
• (c) depositing within the mold structure by micro-machining techniques, a conductive material in sufficient quantity to build up at least one integral coil magnetically coupled with at least one first layer;
• (d) forming, by micro-machining techniques, at least one electrical contact for conducting current through the relay;
• and
• (e) forming, by micro-machining techniques, at least one second layer of magnetic material, in magnetic circuit with at least one first layer and at least one coil, a part of at least one second layer defining at least one deflectable structure, each deflectable structure being deflectable towards at least one first layer when electricity is applied to at least one coil, at least one deflectable structure including an electrically conductive portion for conducting electricity through at least one of the electrical contacts to transition the relay between an open state and a closed state, and wherein the magnetic material of at least one of the first layer and second layer has high magnetic permeability.

A micro-electromechanical relay comprising:

• (a) at least one first layer of magnetic material formed on a substrate by micromachining techniques;
• (b) at least one integral coil magnetically coupled with at least one first layer and fabricated by forming, by micro-machining techniques, a mold structure defining at least one location for at least one electromagnetic coil and depositing within the mold structure, by micro-machining techniques, a conductive material in sufficient quantity to build up such at least one integral coil;
• (c) at least one electrical contact for conducting current through the relay and formed by micro-machining techniques;
• and
• (d) at least one second layer of magnetic material, in magnetic circuit with at least one first layer and at least one coil and formed by micro-machining techniques, a part of at least one second layer defining at least one deflectable structure, each deflectable structure being deflectable towards at least one first layer when electricity is applied to at least one coil, at least one deflectable structure including an electrically conductive portion for conducting electricity through at least one of the electrical contacts to transition the relay between an open state and a closed state, and wherein the magnetic material of at least one of the first layer and second layer has high magnetic permeability.

A spark suppressor micro-electromechanical relay including:

• (a) at least one electrical contact;
• (b) a deflectable structure at least a portion of which is deflected with respect to at least one electrical contact when the relay is activated, the deflectable structure including an electrically conductive portion for conducting electricity through at least one of the electrical contacts to transition the relay between an open state and a closed state;
• and
• (c) at least one micro-lightning rod of conductive material on the deflectable structure such that at least one micro-lightning rod is situated with respect to each electrical contact so as to electrically interact with each contact before the electrically conductive portion of the deflectable structure makes contact with such electrical contacts during transitions of the relay between the open state and the closed state.

A spark suppressor micro-electromechanical relay including:

• (a) at least two electrical terminals;
• (b) at least one electrical contact each coupled to at least one electrical terminal;
• (c) a deflectable structure at least a portion of which is deflected with respect to at least one electrical contact when the relay is activated, the deflectable structure including an electrically conductive portion for conducting electricity through at least one of the electrical contacts to transition the relay between an open state and a closed state;
• (d) at least one first micro-lightning rod of conductive material electrically connected to a first one of the electrical terminals;
• (e) at least one second micro-lightning rod of conductive material electrically connected to a second one of the electrical terminals;
• wherein at least one first micro-lightning rod is spaced from at least one second micro-lightning rod sufficiently to form a spark gap.